Microsystems Laboratory
Facilities and Equipment
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SPEKTRA
High Frequency Primary calibration system: vibration
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The system uses a laser vibrometer as the primary reference standard to accomplish absolute calibration of vibration transducers, calibrators, meters, and sensors. The result of calibration is the transfer coefficient or its level in dB and a statement of its range of uncertainty. The performance of a calibration system for vibration is mainly dependent on the vibration exciter. A high-frequency, air-bearing vibration exciter with vibration isolators is used to achieve the performance required and low levels of uncertainty. The system has capability of vibration excitation in transversal direction for cross-axis calibration. The particular application of this instrument is vibration excitation for the final characterization and calibration of a sensor. Applications:
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| The OVF Modular Laser Vibrometer system by Polytec is available for non-contact vibration analysis of out-of-plane motion for MEMS or other microstructures regardless of the sample size. This type of interferometer utilizes the Doppler effect to acquire the characteristics of mechanical vibrations or transient motion processes. The velocity and displacement amplitude information of a vibrating object is recovered from frequency or phase modulation of the laser light due to the Doppler effect. The system comprises a vibrometer controller, optics and decoder modules. The particular application of this instrument for the project is the measurements of the natural frequency of an oscillating spherical microfabricated cell. Applications:
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| A custom, multiport vacuum chamber with electrical feed-throughs has been developed and interfaced with a turbo vacuum pump package that allows for PID controlled pressures from 2 Torr to 0.01 mTorr. Applications:
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The Ideal Aerosmith 1291BR rate table capable of various computer programmable operational modes (constant rate and acceleration, sinusoidal rotation, externally specified motion). The 1291BR provides 0.01% rate accuracy and has been interfaced with a thermal chamber that allows testing of devices through a -65 to 150 °C controllable temperature range. Applications:
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| Optical characterization equipment includes high-precision micro-manipulators and positioners, Ocean Optics High-Resolution spectrometer, HP Optical Spectrum Analyzer, ThorLabs PAX system for free space polarimetry and power monitoring. Applications:
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| A versatile testbed for nuclear magnetic resonance (NMR) physics experiments as well as characterization of microfabricated alkali vapor cells is also available in the lab. This setup allows a user to apply magnetic fields along two perpendicular axes, and also contains a heater for the vapor cell. Additionally, this system can be used to evaluate different types of light sources (lasers, Rb discharge lamps, etc) and photodetectors. Applications:
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The
Macromanipulator: versatile probe
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| The Macromanipulator precision semiautomatic probe stations enables die level characterization of devices. A Computer Microvision system is available for capturing and measuring small amplitude motion of MEMS devices using stroboscopic illumination. Applications:
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| The workstation contains a Quad Core Intel Xeon Processor for substantial computational power and features a mix of architectures to provide high computational throughput. A particular feature of the workstation is the opportunity for researchers to combine their own systems with the server.
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