IP

Intellectual Property

Below is a partial listing of the intellectual property developed within the MicroSystems Lab. For more information, please contact the UCI Office of Technology Alliances (OTA).

 

UC Case No. Date Title Licensing Contact
2015-218-2 04/04/2017 METHOD OF THROUGH-WAFER INTERCONNECTS FOR MEMS DOUBLE-SIDED (TWIDS) FABRICATION Alvin K. Viray
(949) 824-3104
2013-014-3 08/30/2016 ENVIRONMENTALLY ROBUST MICRO-WINEGLASS GYROSCOPE Alvin K. Viray
(949) 824-3104
2015-218 10/14/2014 TRU-WAFER INTERCONNECTS FOR MEMS DOUBLE-SIDED FABRICATION PROCESS (TWIDS) Alvin K. Viray
(949) 824-3104
2015-139 09/24/2014 FULLY BALANCED MICRO-MACHINED INERTIAL SENSOR Alvin K. Viray
(949) 824-3104
2014-979 6/9/2014 AXI-SYMMETRIC SMALL-FOOTPRINT GYROSCOPE WITH INTERCHANGEABLE WHOLE-ANGLE AND RATE OPERATION Alvin K. Viray
(949) 824-3104
2014-612 2/24/2014 UTILIZATION OF MECHANICAL QUADRATURE IN SILICON MEMS VIBRATORY GYROSCOPE TO INCREASE AND EXPAND THE LONG TERM IN-RUN BIAS IN STABILITY Alvin K. Viray
(949) 824-3104
2014-357 11/20/2013 MICRO-GLASSBLOWN GYROSCOPES Alvin K. Viray
(949) 824-3104
2009-547 10/08/2013 MICROMACHINED GYROSCOPES WITH 2-DOF SENSE MODES ALLOWING INTERCHANGEABLE ROBUST AND PRECISION OPERATION Alvin K. Viray
(949) 824-3104
2013-493 *** 3/15/2013 LEVER MECHANISMS FOR ANTI-PHASE MODE ISOLATION IN MEMS TUNING FORK STRUCTURES Alvin K. Viray
(949) 824-3104
2013-014 3/15/2013 MICROFABRICATION OF HIGH QUALITY 3-D STRUCTURES USING WAFER-LEVEL GLASS BLOWING OF FUSED QUARTZ AND ULTRA LOW EXPANSION GLASSES Alvin K. Viray
(949) 824-3104
2013-013 *** 1/28/2013 MULTI-AXIS CHIP-SCALE MEMS INERTIAL MEASUREMENT UNIT (IMU) SYSTEM BASED ON FREQUENCY MODULATION Alvin K. Viray
(949) 824-3104
2007-376 12/18/2012 SINGLE WAFER FABRICATION FOR WAVELENGTH DEPENDENT REFLECTANCE FOR LINEAR OPTICAL SERIALIZATION OF ACCELEROMETERS Alvin K. Viray
(949) 824-3104
2009-748 *** 12/04/2012 MICROMACHINED TUNING FORK GYROSCOPES WITH ULTRA-HIGH SENSITIVITY AND SHOCK REJECTION Alvin K. Viray
(949) 824-3104
2007-367-2 12/18/2012 SINGLE WAFER FABRICATION PROCESS FOR WAVELENGTH DEPENDENT REFLECTANCE FOR LINEAR OPTICAL SERIALIZATION OF ACCELEROMETERS Alvin K. Viray
(949) 824-3104
2013-014 07/23/2012 MICROFABRICATION OF HIGH QUALITY 3-D STRUCTURES USING WAFER-LEVEL GLASSBLOWING OF FUSED QUARTZ AND ULTRA LOW EXPANSION GLASSES Alvin K. Viray
(949) 824-3104
2011-199 *** 9/16/2010 HIGH RANGE DIGITAL ANGULAR RATE SENSOR BASED ON FREQUENCY MODULATION Alvin K. Viray
(949) 824-3104
2006-176-2 04/13/2010 METHOD AND APPARATUS FOR WATER-LEVEL MICRO-GLASS- BLOWING Alvin K. Viray
(949) 824-3104
2010-527-0 2/1/2010 3-D FOLDED MEMS TECHNOLOGY FOR MULTI-AXIS SENSOR SYSTEMS Alvin K. Viray
(949) 824-3104
2010-231-0 10/6/2009 THREE-DIMENSIONAL WAFER-SCALE BATCH-MICROMACHINED ANGLE/ANGULAR RATE MICROSHELL RESONATOR GYROSCOPE Alvin K. Viray
(949) 824-3104
2008-601-01 3/17/2008 MULTILAYER REFLECTIVE COATING FOR MICRO-CAVITY SIDEWALLS Alvin K. Viray
(949) 824-3104
2008-503-01 1/3/2008 TEMPERATURE-ROBUST MEMS GYROSCOPE WITH 2-DOF SENSE-MODE ADDRESSING THE TRADEOFF BETWEEN BANDWIDTH AND GAIN Alvin K. Viray
(949) 824-3104
2003-184-1 05/27/2008 NONRESONANT MICROMACHINED GYROSCOPES WITH STRUCTURAL MODE-DECOUPLING Alvin K. Viray
(949) 824-3104
2008-125 8/15/2007 FOLDED MICRO-GYROSCOPE WITH NUCLEAR MAGNETIC RESONANCE SENSING Alvin K. Viray
(949) 824-3104
2008-002 7/30/2007 COMPACT ATOMIC MAGNETOMETER AND GYROSCOPE BASED ON A DIVERGING LASER BEAM Alvin K. Viray
(949) 824-3104
2007-377 *** 1/11/2007 A CAPACITIVE DETECTION SCHEME WITH INHERENT SELF-CALIBRATION Alvin K. Viray
(949) 824-3104
2003-451-1 09/05/2006 DISTRIBUTED-MASS MICROMACHINED GYROSCOPE OPERATED WITH DRIVE-MODE BANDWIDTH ENHANCEMENT Alvin K. Viray
(949) 824-3104
2006-519 3/16/2006 GLASS BLOWING ON A WAFER SCALE Alvin K. Viray
(949) 824-3104
2006-480 2/27/2006 SNAP-ACTION BISTABLE MICROMECHANISM ACTUATED BY NONLINEAR RESONANCE Alvin K. Viray
(949) 824-3104
2004-104-2 05/09/2006 A METHOD OF SIMULTANEOUSLY AND DIRECTLY GENERATING AN ANGULAR POSITION AND ANGULAR VELOCITY MEASUREMENT IN
A MICROMACHINED G
Alvin K. Viray
(949) 824-3104
2006-309 11/18/2005 ROBUST SIX DEGREE-OF-FREEDOM MICROMACHINED GYROSCOPE WITH ANTI-PHASE DRIVE SCHEME Alvin K. Viray
(949) 824-3104
2006-176 9/29/2005 WAFER-LEVEL MICRO-GLASS BLOWING Alvin K. Viray
(949) 824-3104
2006-030 7/18/2005 SINGLE-MASK FABRICATION PROCESS FOR LINEAR AND ANGULAR PIEZORESISTIVE ACCELEROMETERS Alvin K. Viray
(949) 824-3104
2006-029 7/18/2005 ASSEMBLY PROCESS FOR OUT-OF-PLANE MEMS AND THREE-AXIS SENSORS Alvin K. Viray
(949) 824-3104
2005-326 12/1/2004 MICROMACHINED NUCLEAR MAGNETIC RESONANCE GYROSCOPE Alvin K. Viray
(949) 824-3104
2005-199 10/14/2004 ROBUST MICROMACHINED GYROSCOPES WITH 2-DOF SENSE-MODE OSCILLATOR Alvin K. Viray
(949) 824-3104
2004-542 4/16/2004 POST-RELEASE CAPACITANCE ENHANCEMENT METHOD IN MICROMACHINED DEVICES Alvin K. Viray
(949) 824-3104
2004-508 7/19/2005 TORSIONAL NONRESONANT z-AXIS MICROMACHINED GYROSCOPES WITH NON-RESONANT ACTUATION TO MEASURE THE ANGULAR ROTATION OF AN OBJECT Alvin K. Viray
(949) 824-3104
2001-140-2 01/25/2005 NON-RESONANT FOUR DEGREES OF FREEDOM MICROMACHINED GYROSCOPE WITH DYNAMIC DISTURBANCE REJECTION AND METHOD OF OPERATING THE Alvin K. Viray
(949) 824-3104
2004-104 9/8/2003 A SENSOR WITH MICRON SIZED FEATURE SIZES CAPABLE OF SIMULTANEOUSLY MEASURING ABSOLUTE ANGLES OF ROTATION AND ANGULAR ROTATIONAL RATES Alvin K. Viray
(949) 824-3104
2003-451 5/8/2003 A BROAD-BAND DISTRIBUTED-MASS MICROMACHINED GYROSCOPE TO MEASURE THE ANGULAR ROTATION OF AN OBJECT Alvin K. Viray
(949) 824-3104
2003-209 11/25/2002 MULTI STAGE CONTROL ARCHITECTURE FOR ERROR SUPPRESSION IN MICROMACHINED GYROSCOPES Alvin K. Viray
(949) 824-3104
2003-184 11/8/2002 NON-RESONANT MICROMACHINED GYROSCOPES WITH STRUCTURAL MODE-DECOUPLING Alvin K. Viray
(949) 824-3104
2003-135 10/8/2002 MICROMACHINED VIBRATORY RATE INTEGRATING GYROSCOPES, MICROMACHINED INERTIAL SENSORS Alvin K. Viray
(949) 824-3104
2001-140 10/19/2000 WIDE-BANDWIDTH MICROMACHINED GYROSCOPE TO MEASURE THE ANGULAR ROTATION OF AN OBJECT Alvin K. Viray
(949) 824-3104

*** This case has been licensed.