The research efforts in the UCI MicroSystems Laboratory are focused on development of MEMS (Micro-Electro-Mechanical Systems) sensors and actuators based on novel design concepts. Current research projects on MEMS Inertial Sensors (gyroscopes and accelerometers) involve design, modeling, fabrication, characterization, control system and sensing electronics design, and integration of advanced sensor systems.

UCI MicroSystems Laboratory
University of California, Irvine
Mechanical and Aerospace Engineering Department
Engineering Gateway 2110
Irvine, CA 92697
Phone: (949) 824 6314

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Latest News:

  • Jesper Eklund and Andrei Shkel's paper "Single-mask fabrication of high-G piezoresistive accelerometers with extended temperature range" was chosen for inclusion in the Journal of Micromechanics and Microengineering 2007 Highlights. The papers selected for this showcase were a combination of the most accessed papers online and those considered to be of the highest quality by the Editorial Board. (03/13/2008)
  • Alex Trusov and Adam Schofield's work on "A Standalone Programmable Signal Processing Unit for Versatile Characterization of MEMS Gyroscopes" was featured in the IEEE Sensors Council Newsletter. (02/19/2008)
  • US Patent and Trademark Office has issued two US Patents (#7,284,430 and #7,279,761) to Cenk Acar and Andrei Shkel on Robust micromachined gyroscopes with two degrees of freedom sense-mode oscillator and Post-release capacitance enhancement in micromachined devices. (12/07/2007)
  • Jesper Eklund and Andrei Shkel's JMEMS paper "Glass Blowing on a Wafer Level" was highlighted in Lab on a Chip (vol. 7, no. 6, p. 664) as an article of particular significance/value to miniaturization research. [PDF] (11/01/2007)
  • Jasmina Casals was awarded 5000 euros prize for her Ph.D. thesis by the Professional Association of Industrial Engineers. Her thesis is entitled "Snap-Action Bistable Micromechanism Actuated by Non-linear Resonance." (06/28/2007)
  • UCI MicroSystems Laboratory will present 2 papers at the IEEE Sensors Conference to be held in Atlanta, Georgia, USA, on October 28-31, 2007. (05/21/2007)
  • Jesper Eklund was featured in the news section of the Henry Samueli School of Engineering's website. The article will also appear in the next edition of the school's magazine, Innovations. (04/17/2007)
  • MicroSystems Laboratory invites applicants for a Postdoctoral Scholar position in the area of advanced control and signal processing, see http://www.eng.uci.edu/node/1194. (04/12/2007)
  • The MicroSystems Laboratory and UCI's microfabrication activities were featured in the Orange County Register. Article, Slideshow, Video. (04/10/2007)
  • UCI MicroSystems Laboratory will present 2 papers at the TRANSDUCERS’07 conference to be held in Lyon, France, on June 10-14, 2007. (02/28/2007)
  • Prof. Shkel is co-organizing a symposium on Modeling, Analysis, and Characterization of Dynamic MEMS at the Mechanical Vibration and Noise Conference (IDETC 2007). (01/09/2007)
  • Max Perez was the first runner up (2nd place) in the Best Student Paper Competition at the IEEE Sensors 2006, Daegu, Korea. The competition recognizes excellence among student participants and was sponsored by SAMSUNG. (10/30/2006)
  • MicroSystems Lab's innovations in solid-state and atomic micro-gyroscopes are featured in the University of California Annual Report on technology transfer, in the article "UCI researchers put a new spin on gyroscopes". (10/12/2006)
  • US Patent and Trademark Office has issued US Patent #7,100,446 to Cenk Acar and Andrei Shkel on Distributed-Mass Micromachined Gyroscopes Operated with Drive-Mode Bandwidth Enhancement. (10/09/2006)
  • Jesper Eklund's paper entitled "Spherical Rubidium Vapor Cells Fabricated by Micro Glass Blowing" has been accepted for oral presentation at the IEEE MEMS 2007 Conference in Kobe, Japan. (09/25/2006)
  • Max Perez won the 2006 IEEE Sensors Council Award. This prestigious Annual Graduate Student Scholarship Award sponsored by General Electric recognizes excellence in graduate student sensors-related research. Max was selected from 133 applicants from around the world. In addition to the cash prize, the IEEE Sensors Council will sponsor Max's travel expenses to participate in 2006 IEEE Sensors Conference in Daegu, Korea, where he will also present a paper. (09/24/2006)
  • Professor Shkel received the 2006 Fariborz Maseeh Best Faculty Research Award. (06/05/2006)
  • US Patent and Trademark Office has issued US Patent #7,040,164 to Chris Painter and Andrei Shkel on Method of Simultaneously and Directly Generating an Angular Position and Angular Velocity Measurement in A Micromachined Gyroscope. (05/18/2006)
  • Adam Schofield was awarded Third Prize in The Carl Zeiss Center of Excellence SEM contest. (05/02/2006)
  • UCI MicroSystems Laboratory received DARPA sub-award on the amount of $1,250,000 for development of the world's first micromachined gyroscope based on spin-polarized nuclei precession. This DARPA program, called Navigation Grade Integrated Micro Gyroscopes (NGIMG), supports the development of novel micro- or nano-engineered devices capable of sensing rotation rate with navigation-grade performance. (10/10/2005)
  • US Patent and Trademark Office has issued US Patents #6,934,660 and #6,928,874 to Chris Painter and Andrei Shkel on Dynamically Amplified Rate Integrating Gyroscope and Multi-stage Control Architecture for Error Suppression in Micromachined Gyroscopes. (10/9/2005)
  • UCI MicroSystems Lab is inviting applications for Postdoctoral Scholar Positions in Electronic Design for MEMS and in Micro-Fabrication and Packaging. (06/17/2005)
  • UCI MicroSystems Laboratory will present 7 papers at the IEEE Sensors 2005 Conference in Irvine, California. (06/09/2005)
  • British Aerospace Engineering (BAE) Inc. hired Ph.D. graduate Chris Painter to work on the development of the next generation silicon inertial sensors. (05/25/2005)
  • Members of the MicroSystems Lab presented five posters at the California: Prosperity Through Technology 2005 Industry Research Symposium on May 23, 2005. (05/25/2005)
  • UCI MicroSystems Laboratory presented 3 papers (1, 2, 3) at the NSTI Nanotech 2005 Conference in Anaheim, California. (05/20/2005)
  • Two of the lab's papers (1, 2) published by the Institute of Physics Publisher in the Journal of Microelectronics and Microengineering have been added to the University of California eScholarship Repository. (03/21/2005)
  • US Patent and Trademark Office has issued US Patent #6,845,669 to Cenk Acar and Andrei Shkel on Non-resonant Four Degrees-of-Freedom Micromachined Gyroscope. (01/25/2005)
  • UCI MicroSystems Laboratory will be presenting 3 papers at the Nanotech 2005 Conference, Anaheim, California, in May 2005. (01/12/2005)
  • Prof. Shkel granted 2005 NSF CAREER award. This five-year grant in the amount of $400,000 will support the project on a MEMS-based Electronic Prosthesis Mimicking the Dynamic Vestibular Function. (12/14/2004)
  • UC Discovery Program with matching from BEI Technology (Systron Donner Inertial Division) awarded $921,710 grant (UC Discovery $383,205 and BEI $538,505) to the UCI MicroSystems Lab to develop Automotive Grade MEMS Rate Gyroscopes. (11/29/2004)