Patents

  • A. Shkel amd M. Little “Surface micromachining using a thick release process”, U.S.Patent 6,531,332 [PDF]
  • Shkel, Andrei M.; Howe, Roger T. “Micro-machined angle-measuring gyroscope” U.S. Patent 6,481,285 [PDF]
  • Michael J. Little and Andrei M. Shkel “Monolithic 2D Optical Switch and method of Fabrication,” U.S. Patent 6,430,333 [PDF]
  • Acar C., Shkel A.M. “Non-Resonant Micromachined Gyroscopes With Structural Mode-Decoupling” UC Office of Technology Transfer, U.S. Patent 7,377,167 [PDF]
  • Painter C. and Shkel A.M., Micromachined Vibratory Rate Integrating Gyroscope, Micromachined Inertial Sensors”, UC Office of Technology Transfer, UC Case No. 2003-135-1
  • Acar C., Shkel A.M. “Wide-Bandwidth Micromachined Gyroscope to Measure the Angular Rotation of an Object” UC Office of Technology Transfer, UC Case No. 2001-140-1
  • Shkel A.M., Little M. “Fabrication of Micro-Electro-Mechanical Systems (MEMS) with thick release layer” (patent pending application. Solus Micro Technologies Inc. Applied 11/12/00
  • Shkel A.M., Little M. “Means for Linear Electrostatic Actuation for Out-of-plane tunable MEMS interferometers” (patent pending application. Solus Micro Technologies Inc. Applied 12/21/01

Journal Papers

  • Cenk Acar and Andrei M. Shkel, “Four Degrees-of-Freedom Micromachined Gyroscopes” Journal of Modeling and Simulations of Microsystems, Vol. 2, No. 1, pp. 71-82, 2001.[PDF]

Archival Conference Proceedings

  • J. Liu, A.M. Shkel, K. Niez, and F.-G. Zeng “System Design and Experimental Evaluation of a MEMS-based Semicircular Canal Prosthesis” Proceedings of the 1st International IEEE EMBS Conference on Neural Engineering, Capri Island, Italy. March 20-22, 2003. [PDF]
  • Alvarez J.C., Prieto D.A., Gonz’alez R.C., Shkel A.M., Lumelsky V.J. “Sensor Management for Local Obstacle Detection in Mobile Robots” 2002 IEEE/RSJ International Conference on Intelligent Robots and Systems, Sept. Oct., 2002, EPFL, Switzerland [PDF]
  • C. Acar and A. Shkel, A Class of MEMS Gyroscopes with Increased Parametric Space, IEEE Sensors Conference, June 2002, Orlando, FL, USA [PDF]
  • C. Painter and A. Shkel. Active structural error suppression in MEMS vibratory gyroscopes, IEEE Sensors 2002, Orlando, FL, June 2002 [PDF]
  • Shkel A.M., Jiayin Liu , Chris Ikea, Fan-Gang Zeng  “Architecture, Feasibility Study, and a Prototype of Vestibular Implant Using MEMS Gyroscopes” 2002 IEEE Sensors, June 2002, Orlando, FL, USA [PDF]
  • C. Acar and A. Shkel, Design Concept and Preliminary Experimental Demonstration of MEMS Gyroscopes with ‘Master-Slave’ Architecture,SPIE Conference on Smart Electronics and MEMS, 2002 [PDF]
  • C. Painter and A. Shkel. Identification of anisoelasticity for electrostatic “trimming” of rate integrating gyroscopes, 2002 SPIE Annual International Symposium on Smart Structures and Materials, San Diego, CA, March 2002 [PDF]
  • C. Acar, S. Eler, and A. Shkel, Concept, Implementation and Control of Wide Bandwidth MEMS Gyroscopes, American Control Conference, June 2001, Arlington, VA, USA [PDF]
  • Shkel A. M., “Smart MEMS: Micro-Structures with Error-Suppression and Self-Calibration Control Capabilities”. The American Control Conference. June, 2001, Arlington VA, USA [PDF]
  • Seshia A., Howe R.T., Shkel A. M., Montague S., “An Integrated Microelectromechanical Resonant Output Gyroscope”, Submitted to 14th International Conference on Micro-Electro-Mechanical Systems, January, 2001, Interlaken, Switzerland [PDF]
  • C. Acar and A. Shkel, Microgyroscopes with Dynamic Disturbance Rejection, SPIE Conference on Smart Electronics and MEMS, Newport Beach, March 2001[PDF]
  • C. Painter, A. Shkel. Structural and thermal analysis of a MEMS angular gyroscope. SPIE’s 8th annual symposium on Smart Structures and Materials,Newport Beach, CA, March 2001 [PDF]
  • Shkel A.M., “Micromachined Gyroscopes: Challenges, Design Solutions, and Opportunities” 2001 SPIE Annual International Symposium on Smart Structures and Materials, March, 2001, Newport Beach ,CA [PDF]
  • Jung-sik Moon, Shkel A. M, “Analysis of Imperfections in a Micromachined Tunable-Cavity Interferometer”,2001 SPIE Annual International Symposium on Smart Structures and Materials, March, 2001, Newport Beach, CA [PDF]
  • J.I. Young and A.M. Shkel. Comparative Study of 2-DOF Micromirrors for Precision Light Manipulation. Proceedings of SPIE: SPIE Smart Structures and Materials Conference. Newport Beach, CA., March 4-7, 2001. [PDF]
  • C. Acar and A. Shkel, A design Approach for Increasing Robustness of Rate Gyroscopes,Modeling and Simulation of Microsystems Conference, Hilton Head Island, South Carolina, March 19-22, 2001 [PDF]
  • C. Painter, A. Shkel. Study of a Novel Isotropic Suspension Design for an Angular Gyroscope.Modeling and Simulation of Microsystems Conference, Hilton Head Island, SC, March 2001 [PDF]
  • Johanna Young, Shkel A. M, “2-DOF Micromirrors for Precision Light Manipulation”, Intern. Conf. On Modeling and Simulation of Microsystems (MSM’2001) March 2001, Hilton Head Island, South Carolina, U.S.A. [PDF]
  • Jung-sik Moon and Shkel A. M., “Performance Limits of Micromachined Tunable-Cavity Filter”. Intern. Conf. On Modeling and Simulation of Microsystems (MSM’2001) March 2001, Hilton Head Island, South Carolina, U.S.A. [PDF]

Theses

  • C. Acar, Four Degrees-of-Freedom Micromachined Gyroscopes, M.S. Thesis, University of California Irvine, 2001. [PDF]
  • J. Moon, TUNABLE MICRO-INTERFEROMETERS FOR TELECOMMUNICATION AND SENSOR APPLICATIONS, M.S. Thesis, University of California Irvine, 2001. [PDF]

Technical Reports

  • C. Acar, Four Degrees-of-Freedom Micromachined Gyroscopes, UC Irvine Microsystems Laboratory Technical Report, MSL-01003, 2001. [PDF]
  • C. Acar, Design Concept and Preliminary Experimental Demonstration of 4-DOF MEMS Gyroscopes,UC Irvine Microsystems Laboratory Technical Report, MSL-01006, 2002. [PDF]
  • J.I. Young. Design, Coupled-Field Modeling, Fabrication and Characterization of Micromirrors for Precision Light Manipulation. UC Irvine Microsystems Laboratory Technical Report, MSL-01007. In Progress.