2007-2008

Patents

  • Cenk Acar and Andrei M. Shkel, “Torsional nonresonant z-axis micromachined gyroscope with non-resonant actuation to measure the angular rotation of an object,” U.S. Patent 7,421,898 [PDF]
  • Cenk Acar and Andrei M. Shkel, “Nonresonant micromachined gyroscopes with structural mode-decoupling,” U.S. Patent 7,377,167 [PDF]
  • Cenk Acar and Andrei M. Shkel, “Robust micromachined gyroscopes with two degrees of freedom sense-mode oscillator,” U.S. Patent 7,284,430 [PDF]
  • Cenk Acar and Andrei M. Shkel, “Post-release capacitance enhancement in micromachined devices and a method of performing the same,” U.S. Patent 7,279,761 [PDF]

Journal Papers

  • Jasmina Casals-Terre, Andreu Fargas-Marques and Andrei M. Shkel, “Snap-Action Bistable Micromechanisms Actuated by Nonlinear Resonance,” Journal of Microelectromechanical Systems, Vol. 17, No. 5, pp. 1082-1093, 2008 [PDF]
  • Adam R. Schofield, Alexander A. Trusov and Andrei M. Shkel, “Effects of Operational Frequency Scaling in Multi-Degree of Freedom MEMS Gyroscopes,” IEEE Sensors Journal, Vol. 8, No. 10, pp. 1672-1680, 2008 [PDF]
  • Alexander A. Trusov, Adam R. Schofield and Andrei M. Shkel, “A Substrate Energy Dissipation Mechanism in In-Phase and Anti-Phase Micromachined z-axis Vibratory Gyroscopes,” Journal of Micromechanics and Microengineering, Vol. 18, pp. 095016, 2008 [PDF]
  • Maximillian A. Perez and Andrei M. Shkel, “The effect of squeeze film constriction on bandwidth improvement in interferometric accelerometers,” Journal of Micromechanics and Microengineering, Vol. 18, No. 5, pp. 055031, 2008 [PDF]
  • E. Jesper Eklund, Andrei M. Shkel, Svenja Knappe, Elizabeth Donley and John Kitching, “Glass-blown spherical microcells for chip-scale atomic devices,” Sensors and Actuators A: Physical, Vol. 143, Issue 1, pp. 175-180, 2008 [PDF]
  • Alexander A. Trusov and Andrei M. Shkel, “A Novel Capacitive Detection Scheme With Inherent Self-Calibration,” Journal of Microelectromechanical Systems, Vol. 16, No. 6, pp. 1324-1333, 2007 [PDF]
  • Maximillian A. Perez and Andrei M. Shkel, “Design and Demonstration of a Bulk Micromachined Fabry-Perot µg-Resolution Accelerometer,” IEEE Sensors Journal, Vol. 7, No. 12, pp. 1653-1662, 2007 [PDF]
  • Andreu Fargas-Marques, Jasmina Casals-Terré, and Andrei M. Shkel, “Resonant Pull-In Condition in Parallel-Plate Electrostatic Actuators,” IEEE/ASME Journal of Microelectromechanical Systems, Vol. 16, No. 5, pp. 1044-1053, 2007 [PDF]
  • Alexander A. Trusov and Andrei M. Shkel, “Capacitive detection in resonant MEMS
    with arbitrary amplitude of motion,” Journal of Micromechanics and Microengineering, Vol. 17, No. 8, pp. 1583-1592, 2007 [PDF]
  • Jong S. Kim, Won S. Choi, Dongwook Kim, Andrei Shkel, and Chin C. Lee, “Fluxless silicon-to-alumina bonding using electroplated Au–Sn–Au structure at eutectic composition,” Materials Science and Engineering: A, Vol. 458, pp. 101-107, 2007 [PDF]
  • E. Jesper Eklund and Andrei M. Shkel, “Glass Blowing on a Wafer Level,” Journal of Microelectromechanical Systems, Vol. 16, No. 2, pp. 232-239, 2007 [PDF]
  • E. Jesper Eklund and Andrei M. Shkel, “Single-mask fabrication of high-G piezoresistive accelerometers with extended temperature range,” Journal of Micromechanics and Microengineering, Vol. 17, No. 4, pp. 730-736, 2007 [PDF]

Conference Papers

  • Adam R. Schofield, Alexander A. Trusov and Andrei M. Shkel, “Micromachined Gyroscope Design Allowing for Both Robust Wide-Bandwidth and Precision Mode-Matched Operation,” 2008 IEEE Sensors Conference, Lecce, Italy, Oct. 26-29, 2008 [PDF]
  • Alexander A. Trusov, Adam R. Schofield and Andrei M. Shkel, “Study of Substrate Energy Dissipation Mechanism in in-Phase and Anti-Phase Micromachined Vibratory Gyroscopes,” 2008 IEEE Sensors Conference, Lecce, Italy, Oct. 26-29, 2008 [PDF]
  • Alexander A. Trusov, Adam R. Schofield, and Andrei M. Shkel, “On Mechanisms of Energy Dissipation and Transfer in MEMS Vibratory Gyroscopes Operated in Vacuum,” 8th World Congress on Computational Mechanics (WCCM8), Venice, Italy, June 30 – July 4, 2008 [PDF]
  • A. A. Trusov, A. R. Schofield, and A. M. Shkel, “New Architectural Design of a Temperature Robust MEMS Gyroscope with Improved Gain-Bandwidth Characteristics,” Solid-State Sensors, Actuators, and Microsystems Workshop 2008, Hilton Head Island, South Carolina, June 1-5, 2008 [PDF]
  • M.A. Perez, J. Kitching and A.M. Shkel, “Robust Optical Design of Angled Multilayer Dielectric Mirrors Optimized for Rubidium Vapor Cell Return Reflection,” Solid-State Sensors, Actuators, and Microsystems Workshop 2008, Hilton Head Island, South Carolina, June 1-5, 2008 [PDF]
  • M.A. Perez, U. Nguyen, S. Knappe, E. Donley, J. Kitching, and A.M. Shkel, “Rubidium Vapor Cell with Integrated Nonmetallic Multilayer Reflectors,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), pp. 790-793, Tucson, AZ, USA, January 13-17, 2008 [PDF]
  • Alexander A. Trusov, Ilya Chepurko, Adam R. Schofield, and Andrei M. Shkel, “A Standalone Programmable Signal Processing Unit for Versatile Characterization of MEMS Gyroscopes,” 2007 IEEE Sensors Conference, Atlanta, GA, USA, Oct. 28-31, 2007 [PDF]
  • Adam R. Schofield, Alexander A. Trusov, and Andrei M. Shkel, “Multi-Degree of Freedom Tuning Fork Gyroscope Demonstrating Shock Rejection,” 2007 IEEE Sensors Conference, Atlanta, GA, USA, Oct. 28-31, 2007 [PDF]
  • Maximillian A. Perez and Andrei M. Shkel, “The Performance Effects of Squeeze Film Stiffness on Non-Resonate Interferometric Intertial Sensors,” ASME 2007 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference (IDETC/CIE 2007), Las Vegas, USA, Sept. 4-7, 2007 [PDF]
  • Adam R. Schofield, Alexander A. Trusov, and Andrei M. Shkel, “Structural Design Trade-offs for MEMS Vibratory Rate Gyroscopes with 2-DOF Sense Modes,” ASME 2007 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference (IDETC/CIE 2007), Las Vegas, USA, Sept. 4-7, 2007 [PDF]
  • Alexander A. Trusov and Andrei M. Shkel, “The Effect of High Order Non-Linearities on Sub-Harmonic Excitation with Parallel Plate Capacitive Actuators,” ASME 2007 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference (IDETC/CIE 2007), Las Vegas, USA, Sept. 4-7, 2007 [PDF]
  • Alexander A. Trusov and Andrei M. Shkel, “A Novel Capacitive Detection Scheme with Inherent Self-Calibration,” ASME 2007 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference (IDETC/CIE 2007), Las Vegas, USA, Sept. 4-7, 2007 [PDF]
  • Adam R. Schofield, Alexander A. Trusov, Cenk Acar and Andrei M. Shkel, “Anti-Phase Driven Rate Gyroscope with Multi-Degree of Freedom Sense Mode,” International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS ’07), pp. 1199-1202, Lyon, France, June 10-14, 2007 [PDF]
  • Alexander A. Trusov and Andrei M. Shkel, “Parallel Plate Capacitive Detection of Large Amplitude Motion in MEMS,” International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS ’07), pp. 1693-1696, Lyon, France, June 10-14, 2007 [PDF]
  • E. Jesper Eklund, Andrei M. Shkel, Svenja Knappe, Elizabeth Donley and John Kitching, “Spherical Rubidium Vapor Cells Fabricated by Micro Glass Blowing,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007), pp. 171-174, Kobe, Japan, January 21-25, 2007 [PDF]