2009-2010

Books

  • Shkel A.M. “Inertial Microsensors”. Springer Publisher. MEMS Bookshelf Series, (available for pre-orders, to appear in 2010). Springer Publisher. ISBN 978-0-387-35540-5 [PDF]
  • Acar, C. and Shkel A.M. “MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness”. Springer Publisher. (available for pre-orders, to appear in 2009) ISBN 978-0-387-09535-6 [PDF]

Patents

  • E. Jesper Eklund and Andrei M. Shkel, “Method and Apparatus for Wafer-Level Micro-Glass Blowing,” U.S. Patent 7,694,531 [PDF]

Journal Papers

  • Alexander A. Trusov, Adam R. Schofield, and Andrei M. Shkel, “Performance Characterization of a New Temperature-Robust Gain-Bandwidth Improved MEMS Gyroscope Operated in Air,” Sensors and Actuators A: Physical, Vol. 155, Issue 1, pp. 16-22, 2009 [PDF]
  • Cenk Acar, Adam R. Schofield, Alexander A. Trusov, Lynn E. Costlow and Andrei M. Shkel, “Environmentally Robust MEMS Vibratory Gyroscopes for Automotive Applications,” IEEE Sensors Journal, Vol. 9, No. 12, pp. 1895-1906, 2009 [PDF]
  • Maximillian A. Perez, John Kitching, and Shkel A.M “Design and Demonstration of PECVD Multilayer Dielectric Mirrors Optimized for Micromachined Cavity Angled Sidewalls”,  Sensors and Actuators A: Physical, volume 155 (2009), pp.23-32 [PDF]

Conference Papers

  • Alexander A. Trusov, Igor P. Prikhodko, Sergei A. Zotov, Adam R. Schofield, Andrei M. Shkel, “Ultra-High Q Silicon Gyroscopes with Interchangeable Rate and Whole Angle Modes of Operation,” IEEE Sensors 2010 Conference, Waikoloa, Hawaii, USA, November 1-4, 2010. [PDF]
  • Sergei A. Zotov, Montgomery C. Rivers, Alexander A. Trusov, Andrei M. Shkel, “Chip-Scale IMU Using Folded-MEMS Approach,” IEEE Sensors 2010 Conference, Waikoloa, Hawaii, USA, November 1-4, 2010. [PDF]
  • Igor P. Prikhodko, Sergei A. Zotov, Alexander A. Trusov, Andrei M. Shkel, ” Mechanical Characterization of Micromachined Glass-Blown 3-D Spherical Shells,” NSTI Nanotech 2010 Conference, Anaheim, California, USA, June 20-24, 2010. [PDF]
  • Sergei A. Zotov, Igor P. Prikhodko, Alexander A. Trusov, Andrei M. Shkel, “3-D Micromachined Spherical Shell Resonators with Integrated Electromagnetic and Electrostatic Transducers,” Solid-State Sensors, Actuators, and Microsystems Workshop 2010, Hilton Head Island, South Carolina, USA, June 6-10, 2010. [PDF]
  • Alexander A. Trusov, Adam R. Schofield, and Andrei M. Shkel, “Vacuum Packaged Silicon MEMS Gyroscope with Q-Factor above 0.5 Million,” IMAPS 6th International Conference and Exhibition on Device Packaging, Scottsdale, AZ, USA, March 8-11, 2010. [PDF]
  • Montgomery C. Rivers, Alexander A. Trusov, Sergei A. Zotov, Andrei M.
    Shkel, “Micro IMU Utilizing Folded Cube Approach,” IMAPS 6th International Conference and Exhibition on Device Packaging, Scottsdale, AZ, USA, March 8-11, 2010 [PDF]
  • Adam R. Schofield, Alexander A. Trusov, and Andrei M. Shkel, “Versatile Sub-mTorr Vacuum Packaging for the Experimental Study of Resonant MEMS,” 23rd IEEE MEMS Conference, Wanchai, Hong Kong, China, 24-28 January 2010 [PDF]
  • Alexander A. Trusov, Adam R. Schofield, and Andrei M. Shkel, “Gyroscope Architecture with Structurally Forced Anti-Phase Drive-Mode and Linearly Coupled Anti-Phase Sense-Mode,” Transducers 2009 Conference, Denver, Colorado, USA, June 21-25, 2009 [PDF]
  • Adam R. Schofield, Alexander A. Trusov, and Andrei M. Shkel, “Design Trade-Offs of Micromachined Gyroscope Concept Allowing Interchangeable Operation in Both Robust and Precision Modes,” Transducers 2009 Conference, Denver, Colorado, USA, June 21-25, 2009 [PDF]
  • Marc Salleras, E. Jesper Eklund, Igor P. Prikhodko, and Andrei M. Shkel, “Predictive Thermal Model for Indirect Temperature Measurement Inside Atomic Cell of Nuclear Magnetic Resonance Gyroscope,” Transducers 2009 Conference, Denver, Colorado, USA, June 21-25, 2009 [PDF]