2011-2012

Books

  • Alexander A. Trusov, “Gyroscopes,” book chapter in Encyclopedia of Nanotechnology, Bharat Bhushan, Springer Netherlands, pp. 1008-1020,  ISBN: 978-90-481-9751-4, 2012. [PDF]
  • Shkel A.M. “Inertial Microsensors”. Springer Publisher. MEMS Bookshelf Series, (available for pre-orders, to appear in 2012). Springer Publisher. ISBN 978-0-387-35540-5 [PDF]

Patents

  • Perez; M., Shkel; A., “Single wafer fabrication process for wavelength dependent reflectance for linear optical serialization of accelerometers”, U.S. Patent 8,334,984 [PDF]
  • Trusov; Alexander A., Schofield; Adam, Shkel; Andrei M., “Micromachined tuning fork gyroscopes with ultra-high sensitivity and shock rejection”, U.S. Patent 8,322,213 [PDF]
  • Eklund; Erik J., Shkel; Andrei M., “Self-inflated micro-glass blowing,” U.S. Patent 8,151,600 [PDF]
  • Acar; Cenk, Shkel; Andrei, Schofield; Adam R., Costlow; Lynn E., Madni; Asad M. “Robust six degree-of-freedom micromachined gyroscope with anti-phase drive scheme and method of operation of the same,” U.S. Patent 8,113,050 [PDF]
  • Trusov; Alexander A., Shkel; Andrei M., “Apparatus and method using capacitive detection with inherent self-calibration,” U.S. Patent 8,094,841 [PDF]
  • Eklund; Erik J., Shkel; Andrei M., “Single-mask fabrication process for linear and angular piezoresistive accelerometers,” U.S. Patent 7,939,355 [PDF]
  • Kitching; John, Donley; Elizabeth A., Hodby; Eleanor, Shkel; Andrei, Eklund; Erik Jesper, “Compact atomic magnetometer and gyroscope based on a diverging laser beam,” U.S. Patent 7,872,473 [PDF]

Journal Papers

  • Andrei M. Shkel “Microtechnology Comes of Age”, GPS World, pp. 43-50, September 2011. [Link]
  • Igor P. Prikhodko, Sergei A. Zotov, Alexander A. Trusov, Andrei M. Shkel, “Foucault pendulum on a chip: Rate integrating silicon MEMS gyroscope,” Sensors and Actuators A: Physical, Vol. 177, pp. 67–78, April 2012. [PDF]
  • Sergei A. Zotov, Alexander A. Trusov, Andrei M. Shkel, “High-Range Angular Rate Sensor Based on Mechanical Frequency Modulation,” IEEE/ASME Journal of Microelectromechanical Systems, vol. 21, no. 2, pp. 398-405, April 2012. [PDF]
  • Sergei A. Zotov, Alexander A. Trusov, Andrei M. Shkel, “Three-Dimensional Spherical Shell Resonator Gyroscope Fabricated Using Wafer-Scale Glassblowing,” IEEE JMEMS Letters, In Press, Available online 23 March 2012. [PDF]
  • Alexander A. Trusov, Igor P. Prikhodko, Sergei A. Zotov, Andrei M. Shkel, “Low-Dissipation Silicon MEMS Tuning Fork Gyroscopes for Rate and Whole Angle Measurements,” IEEE Sensors Journal, vol. 11, no. 11, pp. 2763-2770, November 2011. [PDF]
  • Sergei A. Zotov, Montgomery C. Rivers, Alexander A. Trusov, Andrei M. Shkel, “Folded MEMS Pyramid Inertial Measurement Unit,” IEEE Sensors Journal, vol. 11, no. 11, pp. 2780-2789, November 2011. [PDF]
  • Alexander A. Trusov, Adam R. Schofield, Andrei M. Shkel, “Micromachined rate gyroscope architecture with ultra-high quality factor and improved mode ordering,” Sensors and Actuators A: Physical, Vol. 165, Issue 1, pp. 26-34, January 2011. [PDF]
  • Igor P.Prikhodko, Sergei A. Zotov, Alexander A. Trusov and Andrei M. Shkel, “Microscale Glass-Blown Three-Dimensional Spherical Shell Resonators,” IEEE/ASME Journal of Microelectromechanical Systems, vol.20, no.3, pp.691-701, June 2011. [PDF]
  • Adam R. Schofield, Alexander A. Trusov, Andrei M. Shkel, “Micromachined Gyroscope Concept Allowing Interchangeable Operation in Both Robust and Precision Modes,” Sensors and Actuators A: Physical, Vol. 165, Issue 1, pp, 35–42, January 2011. [PDF]

Conference Papers

  • Igor P. Prikhodko, Alexander A. Trusov, Andrei M. Shkel, ” Achieving Long-Term Bias Stability in High-Q Inertial MEMS by Temperature Self-Sensing with a 0.5 Millicelcius Precision,” Solid-State Sensors, Actuators, and Microsystems Workshop 2012, Hilton Head Island, South Carolina, USA, June 3-7, 2012. [PDF]
  • Doruk Senkal, Christopher R. Raum, Alexander A. Trusov, Andrei M. Shkel, “Titania Silicate / Fused Quartz Glassblowing for 3-D Fabrication of Low Internal Loss Wineglass Micro-structures”, Solid-State Sensors, Actuators, and Microsystems Workshop 2012, Hilton Head Island, South Carolina, USA, June 3-7, 2012. [PDF]
  • Alexander A. Trusov, Igor P. Prikhodko, Sergei A. Zotov, and Andrei M. Shkel, “High-Q and Wide Dynamic Range Inertial MEMS for North-Finding and Tracking Applications,” IEEE/ION Position Location and Navigation Symposium (PLANS 2012), Myrtle Beach, SC, April 24-26, 2012. [PDF]
  • Igor P. Prikhodko, Sergei A. Zotov, Alexander A. Trusov, and Andrei M. Shkel, “Thermal Calibration of Silicon MEMS Gyroscopes,” IMAPS 8th International Conference and Exhibition on Device Packaging, Scottsdale, AZ, USA, March 5 – 8, 2012. [PDF]
  • Igor P. Prikhodko, Alexander A. Trusov, and Andrei M. Shkel, “North-Finding with 0.004 Radian Precision Using a Silicon MEMS Quadruple Mass Gyroscope with Q-Factor of 1 Million,” IEEE MEMS 2012 Conference, Paris, France, Jan 28-Feb 2, 2012. [PDF]
  • Alexander A. Trusov, Sergei A. Zotov, and Andrei M. Shkel, “Electrostatic Regulation of Quality Factor in Tuning Fork MEMS,” IEEE Sensors 2011 Conference, Limerick, Ireland, October 28 – 31, 2011. [PDF]
  • Sergei A. Zotov, Alexander A. Trusov, and Andrei M. Shkel, “Experimental Demonstration of a Wide Dynamic Range Angular Rate Sensor Based on Frequency Modulation,” IEEE Sensors 2011 Conference, Limerick, Ireland, October 28 – 31, 2011. [PDF]
  • Doruk Senkal, Igor P. Prikhodko, Alexander A. Trusov, and Andrei M. Shkel, “Micromachined 3-D Glass-Blown Wineglass Structures for Vibratory MEMS Applications,” Technologies or Future Micro-Nano Manufacturing, Napa, California, USA, August 8 – 10, 2011. [PDF]
  • Andrei M. Shkel “Invited: Precision Navigation and Timing Enabled by Microtechnology: Are We There Yet?”, SPIE Defense and Security Sensing, Micro- and Nanotechnology Sensing, Volume 8031, 25-29 April 2011, Orlando, Florida, US. [PDF]
  • Alexander A. Trusov, Igor P. Prikhodko, Sergei A. Zotov, Brenton R. Simon, Luis G. Andrade, Camille A. Ward, and Andrei M. Shkel, “Development of a Single-Chip MEMS Gyrocompass,” Institute of Navigation Joint Navigation Conference (ION JNC), Colorado Springs, Colorado, USA, June 27-30, 2011. [PDF]
  • Igor P. Prikhodko, Sergei A. Zotov, Alexander A. Trusov, and Andrei M. Shkel, “Sub-Degree-per-Hour Silicon MEMS Rate Sensor with 1 Million Q-Factor,” Transducers 2011 Conference, Beijing, China, June 3-9, 2011. [PDF]
  • Alexander A. Trusov, Igor P. Prikhodko, Sergei A. Zotov, and Andrei M. Shkel, “Design and Packaging of Ultra-High Q-Factor MEMS for Inertial Applications,” IMAPS 7th International Conference and Exhibition on Device Packaging, Scottsdale, AZ, USA, March 8 – 10, 2011. [PDF]
  • Adam R. Schofield, Alexander A. Trusov, and Andrei M. Shkel, “Permanent Attachment of Silicon Structures via Joule Heat Induced Welding,” IMAPS 7th International Conference and Exhibition on Device Packaging, Scottsdale, AZ, USA, March 8 – 10, 2011. [PDF]
  • Igor P. Prikhodko, Sergei A. Zotov, Alexander A. Trusov, Andrei M. Shkel, “Foucault Pendulum on a Chip: Angle Measuring Silicon MEMS Gyroscope,” IEEE MEMS 2011, Conference,  Cancun, Mexico, January 23 – 27, 2011. [PDF]
  • Sergei A. Zotov, Igor P. Prikhodko, Alexander A. Trusov, Andrei M. Shkel, “Frequency Modulation Based Angular Rate System,” IEEE MEMS 2011, Conference,  Cancun, Mexico, January 23 – 27, 2011. [PDF]