2013-2014

Books

  • Shkel A.M. “Inertial Microsensors”. Springer Publisher. MEMS Bookshelf Series, (available for pre-orders, to appear in 2014). Springer Publisher. ISBN 978-0-387-35540-5 [Link]

Patents

  • Andrei Shkel,Alex Trusov,Igor Prikhodko,Sergei Zotov “Three-Dimensional Wafer-Scale Batch-Micromachined Sensor and Method of Fabrication for the same.” [PDF]
  • Adam Schofield,Alex Trusov,Andrei Shkel,” Micromachined gyroscopes with 2-DOF sense modes allowing interchangeable robust and precision operation. [PDF]
  • Alex Trusov,Montgomery Rivers,Sergei Zotov,Andrei Shkel,” Three dimensional folded MEMS technology for multi-axis sensor systems”, US Patent 8368154 B2. [PDF]
  • Alex Trusov,Adam Schofield,Andrei Shkel,”Temperature Robust MEMS Gyroscope with 2-DOF sense mode addressing the trade-off between bandwidth and gain”, US Patent 8,443,667[PDF]

Journal Papers

  • Doruk Senkal, Mohammed J. Ahamed, Alexander Trusov, and Andrei M. Shkel, “Electrostatic and Mechanical Characterization of 3-D Micro-wineglass Resonators,” Sensors and Actuators A: Physical, 215, pp. 150-154, 15 August 2014. [PDF]
  • Sergei A. Zotov, Brent R. Simon, Igor P. Prikhodko, Alexander A. Trusov, Andrei M. Shkel, “Quality Factor Maximization through Dynamic Balancing of Tuning Fork Resonator” IEEE Sensors Journal, IEEE Sensors Journal, VOL. 14, NO. 8, pp. 2706 – 2714, AUGUST 2014. [PDF]
  • D. Senkal, M. J. Ahamed, A. A. Trusov, and A. M. Shkel, “Achieving Sub-Hz Frequency Symmetry in Micro-Glassblown Wineglass Resonators,” Journal of Microelectromechanical Systems, vol. 23, no. 1, pp. 30–38, 2014 [PDF]
  • Igor P. Prikhodko, Sergei A. Zotov, Alexander A. Trusov, Andrei M. Shkel, “What is MEMS Gyrocompassing? Comparative Analysis of Maytagging and Carouseling,” IEEE/ASME Microelectromech. Syst. J., vol. 22, no. 6, pp. 1257-1266 Dec. 2013 [PDF]
  • Andrei M. Shkel, “The Chip-Scale Combinatorial Atomic Navigator”, GPS World, August 2013. [PDF]
  • Doruk Senkal, Mohammed J. Ahamed, Alexander A. Trusov, Andrei M. Shkel, “”High Temperature Micro-glassblowing Process Demonstrated on Fused Quartz and ULE TSG” Sensors and Actuators A: Physical, 2013. [PDF]
  • Igor P. Prikhodko, Alexander A. Trusov, Andrei M. Shkel, “Compensation of drifts in high-Q MEMS gyroscopes using temperature self-sensing” Sensors and Actuators A: Physical, 2013. [PDF]

Conference Papers

  • Alexandra Efimovskaya, Andrei M. Shkel, “160 Milli-Ohm Electrical Resistance Thru-Wafer Interconnects with 10:1 Aspect Ratio”. IMAPS 2014 Conference, October 13-16, San Diego,CA, 2014 [Link]
  • Doruk Senkal, Mohammed J. Ahamed, Mohammad H. Asadian, Sina Askari, Andrei M. Shkel, “Out-of-plane electrode architecture for fused silica micro-glassblown 3-D wineglass resonators”. IEEE Sensors 2014 Conference, pp. 994 – 997, November 2-5, Valencia, Spain, 2014 [Link]
  • Jie Han, Sergei A. Zotov, Brenton R. Simon, Igor P. Prikhodko, Gunjana Sharma, Alexander A. Trusov, Andrei M. Shkel, “Electrostatic stabilization of thermal variation in quality factor using anchor loss modulation”. IEEE Sensors 2014 Conference, pp. 998 – 1001, November 2-5, Valencia, Spain, 2014 [Link]
  • Sergei A. Zotov, Igor P. Prikhodko, Brenton, R. Simon, Alexander A. Trusov, Andrei M. Shkel, “Self-Calibrated MEMS Gyroscope with AM/FM Operational Modes, Dynamic Range of 180 dB, and In-Run Bias Stability of 0.1 deg/hr,” Inertial Sensors and Systems – Symposium Gyro Technology 2014, Karlsruhe, Germany, September 16-17, 2014 [PDF]
  • Doruk Senkal, Mohammad J. Ahamed, Sina Askari, Andrei M. Shkel, “MEMS Micro-Glassblowing Paradigm for Wafer-Level Fabrication of Fused Silica Wineglass Gyroscopes”, Eurosensors 2014, Brescia, Italy, September 7-10, 2014 [PDF]
  • Alexander Trusov, David Rozelle, Grant Atikyan, Brenton Simon, Sergei Zotov, Andrei Shkel, Douglas Meyer, “Flat Is Not Dead: Current and Future Performance of Si-MEMS Quad Mass Gyro (QMG) System”, ION JNC 2014, Orlando, FL, USA, June 16-18, 2014 [PDF]
  • Doruk Senkal, Mohammed Jalal Ahamed, Sina Askari, Andrei Shkel, “1 Million Q-Factor Demonstrated on Micro-Glassblown Fused Silica Wineglass Resonators with Out-of-Plane Electrostatic Transduction”, Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head Island, South Carolina, USA, June 8-12, 2014. [PDF]
  • Sergei Zotov, Brenton Simon, Gunjana Sharma, Jie Han, Igor Prikhodko, Alexander Trusov, Andrei Shkel, “Investigation of Energy Dissipation in Low Frequency Vibratory MEMS Demonstrating a Resonator with 25 Minutes Time Constant”, Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head Island, South Carolina, USA, June 8-12, 2014. [PDF]
  • Alexander Trusov, David Rozelle, Grant Atikyan, Sergei Zotov, Brenton Simon, Andrei Shkel, Douglas Meyer, “Non-Axisymmetric Coriolis Vibratory Gyroscope with Whole Angle, Force REbalance, and Self-Calibration”, Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2014), Hilton Head Island, SC, USA, June 8-12, 2014. [PDF]
  • Alexander Trusov, David Rozelle, Grant Atikyan, Brenton Simon, Sergei Zotov, Andrei Shkel, Douglas Meyer, “Flat Is Not Dead: Current and Future Performance of Si-MEMS Quad Mass Gyro (QMG) System”, IEEE/ION PLANS 2014, Monterey, CA, USA, May 6-7, 2014 [PDF]
  • Doruk Senkal, Mohammed Jalal Ahamed, Andrei Shkel, “Design and Modeling of Micro-glassblown Inverted-wineglass Structures”, IEEE ISISS 2014, Laguna Beach, CA, USA, February 25-26, 2014. [PDF]
  • Joan Giner, Lorenzo Valdevit, Andrei Shkel, “Glass-Blown Pyrex Resonator with Compensating Ti Coating for Reduction of TCF”, IEEE ISISS 2014, Laguna Beach, CA, USA, February 25-26, 2014. [PDF]
  • Mohammed Jalal Ahamed, Doruk Senkal, Andrei Shkel, “Effect of Annealing on Mechanical Quality Factor of Fused Quartz Hemispherical Resonator”, IEEE ISISS 2014, Laguna Beach, CA, USA, February 25-26, 2014. [PDF]
  • Sergei Zotov, Igor Prikhodko, Brenton Simon, Alexander Trusov, Andrei Shkel, “Optimization of Orbital Trajectory for Frequency Modulated Gyroscope”, IEEE ISISS 2014, Laguna Beach, CA, USA, February 25-26, 2014. [PDF]
  • Igor Prikhodko, Alexander Trusov, Andrei Shkel, “Comparative Analysis of Nuclear Magnetic Resonance and Whole Angle Coriolis Vibratory Gyroscopes”, IEEE ISISS 2014, Laguna Beach, CA, USA, February 25-26, 2014. [PDF]
  • Brenton Simon, Gunjana Sharma, Sergei Zotov, Alexander Trusov, Andrei Shkel, “Intrinsic Stress of Eutectic Au/Sn Die Attachment and Effect on Mode-Matched MEMS Gyroscopes”, IEEE ISISS 2014, Laguna Beach, CA, USA, February 25-26, 2014. [PDF]
  • Mohammed Jalal Ahamed, Doruk Senkal, Andrei Shkel, “Improvement of Side-wall Roughness in Deep Glass Etched MEMS Vibratory Sensors”, IEEE ISISS 2014, Laguna Beach, CA, USA, February 25-26, 2014. [PDF]
  • Sergei Zotov, Brenton Simon, Gunjana Sharma, Alexander Trusov, Andrei Shkel, “Utilization of Mechanical Quadrature in Silicon MEMS Vibratory Gyroscope to Increase and Expand the Long Term In-Run Bias Stability”, IEEE ISISS 2014, Laguna Beach, CA, USA, February 25-26, 2014. [PDF]
  • Alexander Trusov, G. Atikyan, D.M. Rozelle, A.D. Meyer, Sergei Zotov, Brenton Simon, Andrei Shkel, “Force Rebalance, Whole Angle, and Self-Calibration Mechanization of Silicon MEMS Quad Mass Gyro”, IEEE ISISS 2014, Laguna Beach, CA, USA, February 25-26, 2014. [PDF]
  • Doruk Senkal, Sina Askari, Mohammed J. Ahamed, Eldwin Ng, Vu Hong, Yushi Yang, Chae Hyuck Ahn, Thomas W. Kenny, Andrei M. Shkel, “100k Q-Factor Toroidal Ring Gyroscope Implemented in Wafer-level Epitaxial Silicon Encapsulation Process”, IEEE MEMS 2014, San Francisco, CA, USA, January 26-30, 2014. [PDF]
  • Mohammed J. Ahamed, Doruk Senkal, Alexander A. Trusov and Andrei M. Shkel, “Deep NLD Plasma Etching of Fused Silica and Borosilicate Glass”, IEEE Sensors 2013 Conference, pp. 1767-1770, November 4-6, Baltimore, Maryland, USA, 2013. [PDF]
  • Igor P. Prikhodko, Brenton R. Simon, Gunjana Sharma, Sergei A. Zotov, Alexander A. Trusov, and Andrei M. Shkel, “High and Moderate Level Vacuum Packaging of Vibratory MEMS,” 46-th International Symposium on Microelectronics (IMAPS 2013), Orlando, FL, USA, September 30 – October 3, 2013.[PDF]
  • D.Senkal, M.J.Ahamed, A.A.Trusov, A.M. Shkel, “Demonstration of Sub-1Hz Structural Symmetry in Micro-Glassblown Wineglass Resonators with Integrated Electrodes” IEEE Transducers 2013 Conference, Barcelona,Spain June 16–20, 2013.[PDF]
  • A.A.Trusov, I.P.Prikhodko, D.M.Rozelle, A.D.Meyer, A.M. Shkel, “1 PPM Precision Self-Calibration of Scale Factor in MEMS Coriolis Vibratory Gyroscopes” IEEE Transducers 2013 Conference, Barcelona,Spain June 16–20, 2013.[PDF]
  • Alexander A. Trusov, Sergei A. Zotov, Brenton R. Simon, Andrei M. Shkel, “Silicon Accelerometer with Differential Frequency Modulation and Continuous Self-Calibration,” IEEE MEMS 2013 Conference, Taipei, Taiwan, January 20 – 24, 2013.[PDF]
  • Doruk Senkal, Mohammed J. Ahamed, Alexander A. Trusov, Andrei M. Shkel, “Adaptable Test-bed for Characterization of Micro-wineglass Resonators,” IEEE MEMS 2013 Conference, Taipei, Taiwan, January 20 – 24, 2013.[PDF]