2015-2016

Books

  • Shkel A.M. “Inertial Microsensors”. Springer Publisher. MEMS Bookshelf Series, (available for pre-orders, to appear in 2014). Springer Publisher. ISBN 978-0-387-35540-5 [Link]

Patents

  • Trusov A., Senkal D., Shkel A.,” Microfabrication of high quality three dimensional structures using wafer-level glassblowing of fused quartz and ultra low expansion glasses “, US Patent 9,139,417 [PDF]
  • Trusov A., Zotov S., Shkel A.,”High range digital angular rate sensor based on frequency modulation”, US Patent 8,991,247[PDF]

Journal Papers

  • Sergei A. Zotov, Brenton R. Simon, Alexander A. Trusov, and Andrei M. Shkel, “High Quality Factor Resonant MEMS Accelerometer With Continuous Thermal Compensation,” IEEE Sensors Journal, vol.15, no.9, pp.5045 – 5052, Sept. 2015 [IEEE Xplore]
  • Mohammed J. Ahamed, Doruk Senkal, Alexander A. Trusov, and Andrei M. Shkel, “Study of High Aspect Ratio NLD Plasma Etching and Postprocessing of Fused Silica and Borosilicate Glass,” IEEE/ASME Journal of Microelectromechanical Systems, vol.44, no.4, pp. 790-800, August 2015. [IEEE Xplore]
  • Doruk Senkal, Mohammed J. Ahamed, Mohammad A. Asadian Ardakani, Sina Askari and Andrei M. Shkel, “Demonstration of 1 Million Q-Factor on Microglassblown Wineglass Resonators With Out-of-Plane Electrostatic Transduction,” IEEE/ASME Journal of Microelectromechanical Systems, 24 (1), pp. 29-37, February 2015. [IEEE Xplore]

Conference Papers

  • Yusheng Wang, Mohammad Asadian, Andrei Shkel, “Predictive Analytical Model of Fundamental Frequency and Imperfections in Glassblown Fused Quartz Hemi-Toroidal 3D Micro Shells”, IEEE Sensors 2016, Orlando, FL, USA, Oct30-Nov2, (2016). [IEEE Xplore]
  • Alexandra Efimovskaya, Danmeng Wang, Yu-Wei Lin, and Andrei M. Shkel, “On Ordering of Fundamental Wineglass Modes in Toroidal Ring Gyroscope”, IEEE Sensors 2016, Orlando, FL, USA, Oct30-Nov2, (2016). [IEEE Xplore]
  • Sina Askari, Mohammad H. Asadian, Kasra Kakavand, Andrei M. Shkel, “Near-Navigation Grade Quad Mass Gyroscope with Q-factor Limited by Thermo-Elastic Damping”, Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2016), Hilton Head Island, South Carolina, USA, June 5-9, 2016. [PDF]
  • Alexandra Efimovskaya, Yu-Wei Lin, Andrei M. Shkel, “Thru-Wafer Interconnects for Double-Sided (TWIDS) Fabrication of MEMS”, IEEE Inertial Sensors, Laguna Beach, CA, USA, 22-25 February, 2016. [IEEE Xplore]
  • Sina Askari, Mohammad H. Asadian, Kasra Kakavand, Andrei M. Shkel, “Vacuum Sealed and Getter Activated MEMS Quad Mass Gyroscope Demonstrating Better Than 1.2 Million Quality Factor”, IEEE Inertial Sensors, Laguna Beach, CA, 22-25 February, 2016. [IEEE Xplore]
  • Yusheng Wang, Andrei M. Shkel, “Study on Surface Roughness Improvement of Fused Quartz After Thermal and Chemical Post-Processing”, IEEE Inertial Sensors, Laguna Beach, CA, USA, 22-25 February, 2016. [IEEE Xplore]
  • Brenton R. Simon, Sambuddha Khan, Alexander A. Trusov, Andrei M. Shkel, “Mode ordering in tuning fork structures with negative structural coupling for mitigation of common-mode g-sensitivity”, in SENSORS, 2015 IEEE, Busan, South Korea, 1-4 Nov, 2015. [IEEE Xplore]
  • Yusheng Wang, Andrei M. Shkel, “Near-Zero Power Wake UP System Enabled by Ultra High Q-Factor Array of MEMS Resonators”, 4th International Symposium on Energy Challenges and Mechanics – working on small scales (ECM4), Aberdeen, Scotland, United Kingdom, 11-13 August, 2015. [PDF]
  • Alexandra Efimovskaya, Doruk Senkal, Andrei M. Shkel, “Miniature origami-like folded MEMS TIMU”, IEEE Transducers 2015 Conference 2015, Alaska, USA, June 21-25, 2015. [IEEE Xplore]
  • Doruk Senkal, Alexandra Efimovskaya, Andrei M. Shkel, “Dual foucault pendulum gyroscope”, IEEE Transducers 2015 Conference 2015, Alaska, USA, June 21-25, 2015. [IEEE Xplore]
  • Doruk Senkal, Alexandra Efimovskaya, Andrei M. Shkel, “Minimal realization of dynamically balanced lumped mass WA gyroscope: dual foucault pendulum”, IEEE ISISS 2015, Hawaii, USA, March 23-26, 2015. [IEEE Xplore]
  • Alexandra Efimovskaya, Doruk Senkal, Sina Askari, Andrei M. Shkel, “Origami-like folded mems for realization of TIMU: fabrication technology and initial demonstration”, IEEE ISISS 2015, Hawaii, USA, March 23-26, 2015. [IEEE Xplore]
  • Joan Giner, Andrei M. Shkel, “The concept of “collapsed electrodes” for glassblown spherical resonators demonstrating 200:1 aspect ratio gap definition”, IEEE ISISS 2015, Hawaii, USA, March 23-26, 2015. [IEEE Xplore]
  • Joan Giner, Jason M. Gray, Jonas Gertsch, Victor M. Bright, Andrei M. Shkel, “Design, Fabrication, and Characterization of a Micromachined Glass-Blown Spherical Resonator with In-Situ Integrated Silicon Electrodes and ALD Tungsten Interior Coating”, IEEE MEMS 2015, Estoril, Portugal, January 18-22, 2015. [IEEE Xplore]
  • Doruk Senkal, Eldwin Ng, Vu Hong, Yushi Yang, Chae Hyuck Ahn, Thomas W. Kenny, Andrei M. Shkel, “Parametric Drive of a Toroidal MEMS Rate Integrating Gyroscope Demonstrating < 20 ppm Scale Factor Stability”, IEEE MEMS 2015, Estoril, Portugal, January 18-22, 2015. [IEEE Xplore]