2007-2008:

Journal Papers

  • Maximillian A. Perez and Andrei M. Shkel, "The effect of squeeze film constriction on bandwidth improvement in interferometric accelerometers," Journal of Micromechanics and Microengineering, Vol. 18, No. 5, pp. 055031, 2008 [PDF]
  • E. Jesper Eklund, Andrei M. Shkel, Svenja Knappe, Elizabeth Donley and John Kitching, "Glass-blown spherical microcells for chip-scale atomic devices," Sensors and Actuators A: Physical, Vol. 143, Issue 1, pp. 175-180, 2008 [PDF]
  • Alexander A. Trusov and Andrei M. Shkel, "A Novel Capacitive Detection Scheme With Inherent Self-Calibration," Journal of Microelectromechanical Systems, Vol. 16, No. 6, pp. 1324-1333, 2007 [PDF]
  • Maximillian A. Perez and Andrei M. Shkel, "Design and Demonstration of a Bulk Micromachined Fabry–Perot µg-Resolution Accelerometer," IEEE Sensors Journal, Vol. 7, No. 12, pp. 1653-1662, 2007 [PDF]
  • Andreu Fargas-Marques, Jasmina Casals-Terré, and Andrei M. Shkel, "Resonant Pull-In Condition in Parallel-Plate Electrostatic Actuators," IEEE/ASME Journal of Microelectromechanical Systems, Vol. 16, No. 5, pp. 1044-1053, 2007 [PDF]
  • Alexander A. Trusov and Andrei M. Shkel, "Capacitive detection in resonant MEMS
    with arbitrary amplitude of motion," Journal of Micromechanics and Microengineering, Vol. 17, No. 8, pp. 1583-1592, 2007 [PDF]
  • Jong S. Kim, Won S. Choi, Dongwook Kim, Andrei Shkel, and Chin C. Lee, "Fluxless silicon-to-alumina bonding using electroplated Au–Sn–Au structure at eutectic composition," Materials Science and Engineering: A, Vol. 458, pp. 101-107, 2007 [PDF]
  • E. Jesper Eklund and Andrei M. Shkel, "Glass Blowing on a Wafer Level," Journal of Microelectromechanical Systems, Vol. 16, No. 2, pp. 232-239, 2007 [PDF]
  • E. Jesper Eklund and Andrei M. Shkel, "Single-mask fabrication of high-G piezoresistive accelerometers with extended temperature range," Journal of Micromechanics and Microengineering, Vol. 17, No. 4, pp. 730-736, 2007 [PDF]

Conference Papers

  • A. A. Trusov, A. R. Schofield, and A. M. Shkel, "New Architectural Design of a Temperature Robust MEMS Gyroscope with Improved Gain-Bandwidth Characteristics," Solid-State Sensors, Actuators, and Microsystems Workshop 2008, Hilton Head Island, South Carolina, June 1-5, 2008 [PDF]
  • M.A. Perez, J. Kitching and A.M. Shkel, "Robust Optical Design of Angled Multilayer Dielectric Mirrors Optimized for Rubidium Vapor Cell Return Reflection," Solid-State Sensors, Actuators, and Microsystems Workshop 2008, Hilton Head Island, South Carolina, June 1-5, 2008 [PDF]
  • M.A. Perez, U. Nguyen, S. Knappe, E. Donley, J. Kitching, and A.M. Shkel, "Rubidium Vapor Cell with Integrated Nonmetallic Multilayer Reflectors," IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), pp. 790-793, Tucson, AZ, USA, January 13-17, 2008 [PDF]
  • Alexander A. Trusov, Ilya Chepurko, Adam R. Schofield, and Andrei M. Shkel, "A Standalone Programmable Signal Processing Unit for Versatile Characterization of MEMS Gyroscopes," 2007 IEEE Sensors Conference, Atlanta, GA, USA, Oct. 28-31, 2007 [PDF]
  • Adam R. Schofield, Alexander A. Trusov, and Andrei M. Shkel, "Multi-Degree of Freedom Tuning Fork Gyroscope Demonstrating Shock Rejection," 2007 IEEE Sensors Conference, Atlanta, GA, USA, Oct. 28-31, 2007 [PDF]
  • Maximillian A. Perez and Andrei M. Shkel, "The Performance Effects of Squeeze Film Stiffness on Non-Resonate Interferometric Intertial Sensors," ASME 2007 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference (IDETC/CIE 2007), Las Vegas, USA, Sept. 4-7, 2007 [PDF]
  • Adam R. Schofield, Alexander A. Trusov, and Andrei M. Shkel, "Structural Design Trade-offs for MEMS Vibratory Rate Gyroscopes with 2-DOF Sense Modes," ASME 2007 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference (IDETC/CIE 2007), Las Vegas, USA, Sept. 4-7, 2007 [PDF]
  • Alexander A. Trusov and Andrei M. Shkel, "The Effect of High Order Non-Linearities on Sub-Harmonic Excitation with Parallel Plate Capacitive Actuators," ASME 2007 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference (IDETC/CIE 2007), Las Vegas, USA, Sept. 4-7, 2007 [PDF]
  • Alexander A. Trusov and Andrei M. Shkel, "A Novel Capacitive Detection Scheme with Inherent Self-Calibration," ASME 2007 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference (IDETC/CIE 2007), Las Vegas, USA, Sept. 4-7, 2007 [PDF]
  • Adam R. Schofield, Alexander A. Trusov, Cenk Acar and Andrei M. Shkel, "Anti-Phase Driven Rate Gyroscope with Multi-Degree of Freedom Sense Mode," International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '07), pp. 1199-1202, Lyon, France, June 10-14, 2007 [PDF]
  • Alexander A. Trusov and Andrei M. Shkel, "Parallel Plate Capacitive Detection of Large Amplitude Motion in MEMS," International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '07), pp. 1693-1696, Lyon, France, June 10-14, 2007 [PDF]
  • E. Jesper Eklund, Andrei M. Shkel, Svenja Knappe, Elizabeth Donley and John Kitching, "Spherical Rubidium Vapor Cells Fabricated by Micro Glass Blowing," IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007), pp. 171-174, Kobe, Japan, January 21-25, 2007 [PDF]

Patents

  • Cenk Acar and Andrei M. Shkel, "Robust micromachined gyroscopes with two degrees of freedom sense-mode oscillator," U.S. Patent 7,284,430 [PDF]
  • Cenk Acar and Andrei M. Shkel, "Post-release capacitance enhancement in micromachined devices and a method of performing the same," U.S. Patent 7,279,761 [PDF]

2005-2006:

Journal Papers

  • Andrei M. Shkel and Fan-Gang Zeng, "An Electronic Prosthesis Mimicking the Dynamic Vestibular Function", Audiology and Neurotology. Special issue on Micro- and Nanotechnology for Neurotology. Karger Publisher. Vol. 11, No. 2, 2006 [PDF]
  • Cenk Acar and Andrei M. Shkel, "Inherently Robust Micromachined Gyroscopes With 2-DOF Sense-Mode Oscillator", Journal of Microelectromechanical Systems, Vol. 15, No. 2, pp. 380-387, 2006 [PDF]
  • E. Jesper Eklund and Andrei M. Shkel, "Factors affecting the performance of micromachined sensors based on Fabry-Perot interferometry", Journal of Micromechanics and Microengineering, Vol. 15, No. 9, pp. 1770-1776, 2005 [PDF]
  • Cenk Acar and Andrei M. Shkel, "An Approach for Increasing Drive-Mode Bandwidth
    of MEMS Vibratory Gyroscopes", Journal of Microelectromechanical Systems, Vol. 14, No. 3, pp. 520-528, 2005 [PDF]
  • Cenk Acar and Andrei M. Shkel, "Structurally decoupled micromachined gyroscopes with post-release capacitance enhancement", J. Micromech. Microeng., Vol.15, pp.1092-1101, 2005 [PDF]
  • Maximilian Perez and Andrei Shkel, "Conceptual design and preliminary characterization of serial array system of high-resolution MEMS accelerometers with embedded optical detection" Smart Structures and Systems, Vol. 1, No. 1, pp. 63-82, 2005 [PDF]

Conference Papers

  • Maximillian Perez and Andrei M. Shkel, "Performance Trade-offs of an Interferometric Micro-g Resolution Accelerometer", 2006 IEEE Sensors Conference, Daegu, Korea, 2006 [PDF]
  • Andrei M. Shkel, "An Electronic Prosthesis Mimicking the Dynamic Vestibular
    Function", Proc. SPIE 6174, 617414, Smart Structures and Materials 2006, San Diego, CA, USA [PDF]
  • Maximillian A. Perez and Andrei M. Shkel, "Passive Network of Fabry-Perot based Sensors with Wavelength Multiplexing Capabilities", Proc. SPIE 6174, 617417, Smart Structures and Materials 2006, San Diego, CA, USA [PDF]
  • Alexander Trusov, Cenk Acar and Andrei M. Shkel, "Comparative analysis of distributed mass micromachined gyroscopes fabricated in SCS-SOI and EFAB", Proc. SPIE 6174, 61742A, Smart Structures and Materials 2006, San Diego, CA, USA [PDF]
  • Andrei M. Shkel, "On Development of Totally Implantable Vestibular Prosthesis", pp. 12-19, IFAC Mechatronics 2006, Heidelberg, Germany [PDF]
  • Andrei M. Shkel, "Type I and Type II Micromachined Vibratory Gyroscopes", pp. 586-593, IEEE/ION PLANS 2006, San Diego, CA, USA (invited) [PDF]
  • Cenk Acar, Andrei M. Shkel, Lynn Costlow and Asad M. Madni, "Inherently Robust Micromachined Gyroscopes with 2-DOF Sense-Mode Oscillator", pp. 664-667, 2005 IEEE Sensors, Irvine, CA, USA [PDF]
  • Jasmina Casals-Terre and Andrei Shkel, "Snap-Action Bistable Micromechanism Actuated By Nonlinear Resonance", pp. 893-896, 2005 IEEE Sensors, Irvine, CA, USA [PDF]
  • E. Jesper Eklund and Andrei M. Shkel, "Single-Mask SOI Fabrication Process for Linear and Angular Piezoresistive Accelerometers with On-Chip Reference Resistors", pp. 656-659, 2005 IEEE Sensors, Irvine, CA, USA [PDF]
  • A. Fargas-Marques and A. M. Shkel, "On Electrostatic Actuation Beyond Snapping Condition", pp. 600-603, 2005 IEEE Sensors, Irvine, CA, USA [PDF]
  • Chris Painter and Andrei Shkel, "Experimental Evaluation of a Control System for an Absolute Angle Measuring Micromachined Gyroscope", pp. 1084-1087, 2005 IEEE Sensors, Irvine, CA, USA [PDF]
  • Maximillian Perez, E. Jesper Eklund and Andrei M. Shkel, "Designing Micromachined Accelerometers with Interferometric Detection", pp. 652-655, 2005 IEEE Sensors, Irvine, CA, USA [PDF]
  • Andrei M. Shkel, Cenk Acar and Chris Painter, "Two Types of Micromachined Vibratory Gyroscopes", pp. 531-536, 2005 IEEE Sensors, Irvine, CA, USA [PDF]
  • Cenk Acar, Chris C. Painter, Adam R. Schofield and Andrei M. Shkel, "Robust Micromachined Gyroscopes for Automotive Applications", NSTI Nanotech 2005 Conference, pp. 375-378, May 2005 [PDF]
  • E. Jesper Eklund and Andrei M. Shkel, "Performance Tradeoffs in MEMS Sensors with High-Finesse Fabry-Perot Interferometry Detection", NSTI Nanotech 2005 Conference, pp. 533-536, May 2005 [PDF]
  • M. Perez and A. Shkel, "Elastomeric Composites to Reduce the Effects of Trunnion Mode in Inertial Devices", NSTI Nanotech 2005 Conference, pp. 557-560, May 2005 [PDF]

Patents

  • Cenk Acar and Andrei Shkel, "Distributed-Mass Micromachined Gyroscopes Operated with Drive-Mode Bandwidth Enhancement", U.S. Patent 7,100,446 [PDF]
  • Chris Painter and Andrei Shkel, "Method of Simultaneously and Directly Generating an Angular Position and Angular Velocity Measurement in A Micromachined Gyroscope", U.S. Patent 7,040,164 [PDF]
  • Chris Painter and Andrei Shkel, "Multi-stage Control Architecture for Error Suppression in Micromachined Gyroscopes", U.S. Patent 6,934,660 [PDF]
  • Chris Painter and Andrei Shkel, "Dynamically Amplified Rate Integrating Gyroscope", U.S. Patent 6,928,874 [PDF]
  • Acar, Cenk and Shkel, Andrei M. "Non-Resonant Four Degrees-of-Freedom Micromachined Gyroscope" U.S. Patent 6,845,669 [PDF]

2003-2004:

Journal Papers

  • Chris C.Painter and Shkel A.M., "Structural and Thermal Modeling of a Z-Axis Rate Integrating Gyroscope" Journal of Micromechanics and Microengineering, Institute of Physics Publishing, Vol. 13,  pp.229-237, 2003 [PDF]
  • Cenk Acar and Shkel A.M. "Non-Resonant Micromachined Gyroscopes with Structural Mode-Decoupling" IEEE Sensors Journal, Vol. 3, No. 4, pp. 497-506. [PDF] 
  • Cenk Acar and Shkel A.M. "Structural Design and Experimental Characterization of Torsional Micromachined Gyroscopes with Non-Resonant Drive-Mode" Journal of Micromechanics and Microengineering, Institute of Physics Publishing, Vol. 14, January 2004, pp. 15-25  [PDF]
    [Available at the University of California eScholarship Repository]
  • Cenk Acar and Shkel A.M. "Experimental evaluation and comparative analysis of commercial variable-capacitance MEMS accelerometers" Journal of Micromechanics and Microengineering, Institute of Physics Publishing, Vol. 13,  pp.1-12, 2003 [PDF]
    [Available at the University of California eScholarship Repository]
  • Sadovnichii, V.A., Alexandrov V.V., Alexandrova T.B.,  Lemak C.C., and Shkel A.M.  "Vestibular function in extreme motion conditions of inertial navigation and approaches for its augmentation" Moscow University Mechanics Bulletin, Vol. 4, 2003 [PDF]
  • Chris C. Painter and Andrei M. Shkel, "Active Structural Error Suppression in MEMS Rate Integrating Gyroscopes", IEEE Sensors Journal, Vol. 3, Number 5, pp. 595-606, October 2003 [PDF]

Conference Papers

  • Jasmina Casals-Terre and Andrei Shkel "Dynamic Analysis Of A Snap-Action Micromechanism", pp.1245-1248, 2004 IEEE Sensors, October 2004, Vienna, Austria [PDF]
  • Cenk Acar and Andrei M. Shkel "Post-Release Capacitance Enhancement in Micromachined Devices", pp.268-271, 2004 IEEE Sensors, October 2004, Vienna, Austria [PDF]
  • Chris Painter and Andrei Shkel "Effect of Levitation Forces on the Performance of Surface Micromachined MEMS Gyroscopes", pp. 508-511, 2004 IEEE Sensors, October 2004, Vienna, Austria [PDF]
  • Cenk Acar and Andrei M. Shkel "Non-Resonant Surface-Micromachined Z-Axis Gyroscopes Utilizing Torsional Out-of-Plane Detection", pp. 665-668 2004 IEEE Sensors, October 2004, Vienna, Austria [PDF]
  • Alexandrov V.V., Lemak S., Shkel A.M., Soto E., "Vestibular function in extreme motion conditions of inertial navigation and approaches for its augmentation" 16th IFAC Symposium on Automatic Control in Aerospace, 11-18 June, 2004, St. Petersburg, Russia [PDF]
  • Liu J., Shkel A. M, Zeng F-G "An Electronic Prosthesis Mimicking the DynamicVestibular Function" 2003 IEEE Sensors Conference, September 2003, Toronto, Canada [PDF]
  • Acar C., Shkel A. M, "Distributed-Mass Micromachined Gyroscopes for Enhanced Mode-Decoupling" 2003 IEEE Sensors Conference, September 2003, Toronto, Canada [PDF]
  • Painter C., Shkel A. M, "Dynamically Amplified Rate Integrating Gyroscopes" Intern. Conf. On Modeling and Simulation of Microsystems (MSM'2003) March 2003, San Francisco, CA, U.S.A. [PDF]
  • Liu J., Shkel A. M, Nie K., Zeng F-G "System Design and Experimental Evaluation of a MEMS-based Semicircular Canal Prosthesis" Proceedings of the 1st International IEEE EMBS Conference on Neural Engineering, Capri Island, Italy, March 20-22, 2003 [PDF]
  • Acar C., Shkel A. M "Non-Resonant Micromachined Gyroscopes with Structural Mode-Decoupling" Intern. Conf. On Modeling and Simulation of Microsystems (MSM'2003) March 2003, San Francisco, CA, U.S.A. [PDF]
  • Sadovnichii V.A., Alexandrov V.V., Alexandrova T.B.,  Bugrov, D.I., Lemak C.C., Sotto and Shkel A.M. "Correction of vestibular function in extreme motion conditions of inertial navigation" IV International Aerospace Congress, IAC'2003, 18-23 August 2003, Moscow, Russia [PDF]
  • Painter C. and Shkel A. M, "Introduction to a MEMS based absolute angle measuring gyroscope and comparison with alternative angle measuring technologies" International workshop on structural health monitoring, Stanford University, September 15-17, 2003 [PDF]
  • Acar C. and Shkel A. M "Experimental evaluation and comparative analysis of commercial variable-capacitance MEMS accelerometers" International workshop on structural health monitoring, Stanford University, September 15-17, 2003 [PDF]

2001-2002:

Patents

  • A. Shkel amd M. Little "Surface micromachining using a thick release process", U.S. Patent 6,531,332
  • Shkel, Andrei M.; Howe, Roger T. "Micro-machined angle-measuring gyroscope" U.S. Patent 6,481,285
  • Michael J. Little and Andrei M. Shkel "Monolithic 2D Optical Switch and method of Fabrication," U.S. Patent 6,430,333 [PDF]
  • Acar C., Shkel A.M. "Non-Resonant Micromachined Gyroscopes With Structural Mode-Decoupling" UC Office of Technology Transfer, UC Case No. 2003-184-1
  • Painter C. and Shkel A.M., Micromachined Vibratory Rate Integrating Gyroscope, Micromachined Inertial Sensors", UC Office of Technology Transfer, UC Case No. 2003-135-1
  • Acar C., Shkel A.M. "Wide-Bandwidth Micromachined Gyroscope to Measure the Angular Rotation of an Object" UC Office of Technology Transfer, UC Case No. 2001-140-1
  • Shkel A.M., Little M. "Fabrication of Micro-Electro-Mechanical Systems (MEMS) with thick release layer" (patent pending application. Solus Micro Technologies Inc. Applied 11/12/00
  • Shkel A.M., Little M. "Means for Linear Electrostatic Actuation for Out-of-plane tunable MEMS interferometers"  (patent pending application. Solus Micro Technologies Inc. Applied 12/21/01

Journal Papers

Archival Conference Proceedings

 Theses

Technical Reports

1999-2000:

Journal Papers

  • Shkel A. M., Lumelsky V. J., "Classification of the Dubins Set".  Robotics and Autonomous Systems, Volume 34 , pp. 179-202, 2001
  • Alvarez J. C., Shkel A. M., Lumelsky V. J., "Accounting for Mobile Robot Dynamics in Sensor-Based Motion Planning" International Journal of Robotics and Automation. International Journal of Robotics and Automation, Vol. 16, No. 3, 2001

Archival Conference Proceedings

  • Shkel A. M., Howe R. T., Horowitz R. "Modeling and Simulation of. Micromachined Gyroscopes in Presence of Imperfections"  Intern. Conf. On Modeling and Simulation of Microsystems (MSM’99) April 1999, Puerto Rico, U.S.A.
  • Shkel A. M., Horowitz R., Seshia A., Howe R. T. "Dynamics and Control of Micromachined Gyroscopes." The American Control Conference. June 1999, San Diego, CA
  • Shkel A. M., Howe R. T., Horowitz R. "Micromachined Gyroscopes: Challenges, Design Solutions, and Opportunities" Intern. Workshop on Micro Robots, Micro Machines, and Microsystems (IARP’99). Pp. 27-34. November 1999, Moscow, Russia
  • Shkel A. M., Lumelsky V. J., "On Optimal Nonholonomic Path in a Limited Space. The Jogger’s Problem: Control of Dynamics in Real-Time Motion Planning." IEEE/RSJ Int. Conference on  Intelligent Systems, November, 2000, Japan
  • Alvarez J. C., Shkel A. M., Lumelsky V. J., "Active Sensing in Sensor-Based Motion Planning with Dynamics" International Workshop on Intelligent Robots, September 2000, Viena, Austria

Patents

  • Shkel A. M., Little M., Lion J.  "Paper White Direct View Display" (patent pending application. MEMSolutions Inc. Applied 10/8/99)
  • Shkel A. M., Little M. "Monolithic 2D Optical Switch" (patent pending application. Solus Micro Technologies Inc. Applied 2/12/00)

1995-1998:

Journal Papers

  • Shkel A. M., Lumelsky V. J., "The Jogger’s Problem: Control of Dynamics in Real-Time Motion Planning."  Automatica. Volume 33, Number 7, July 1997, pp. 1219-1233.
  • Shkel A. M., Lumelsky V. J., "Incorporating Body Dynamics into the Sensor-Based Motion Planning Paradigm. The Maximum Turn Strategy."  IEEE Trans. On Robotics and Automation.  Volume 13, Number 6, December 1997.
  • Shen L., Lumelsky V. J., Shkel A. M., "Hazard and Safety Regions for Paths with Constrained Curvature."  Mathematical Methods in the Applied Sciences. Volume 21, pp. 1655-1679, 1998.

Archival Conference Proceedings

  • Lumelsky V. J., Shkel A. M.,  "Incorporating Body Dynamics into the Sensor-Based Motion Planning Paradigm. The Maximum Turn Strategy."  IEEE Intern. Conf. On Robotics and Automation. May 1995, pp.1637-1642, Nagoya, Japan.
  • Shkel A. M., Lumelsky V. J., "The Jogger’s Problem: Accounting for Body Dynamics in Real-Time Motion Planning". IEEE/RSJ Intern. Conf. On Intelligent Robots and Systems. August 1995, pp. 441-447, Pittsburgh, PA.
  • Shkel A. M., Lumelsky V. J., "The Role of Time Constraints in the Design of Control for the Jogger’s Problem". IEEE Intern. Conf. On Decision and Control. December 1995, pp.1618-1623, New Orleans, LA.
  • Shkel A. M., Lumelsky V.J., "On Calculation of Optimal Paths with Constrained Curvature: The Case of Long Paths". IEEE Intern.  Conf. On Robotics and Automation. April 1996, pp.3578-3583, Minneapolis, MN.
  • Shkel A. M., Lumelsky V. J., "Curvature-Constrained Motion Within a Limited Workspace." IEEE Intern. Conf. On Robotics and Automation. April 1997, pp.1394-1399, Albuquerque, NM.
  • Alvarez J. C, Shkel A. M., Lumelsky V. J. "Accounting for Mobile Robot Dynamics in Sensor-Based Motion Planning: Experimental Results" IEEE Intern. Conf. On on Robotics and Automation.  May 1998, Leuven, Belgium.
  • Shkel A. M., Lumelsky V. J., "Motion Planning Algorithm for Nonholonomic Robots Within a Limited Workspace."  IEEE/RSJ Intern. Conf. On Intelligent Robots and Systems. October 1998, Victoria, Canada.

Patents

  • Shkel A. M. "Micromachined Gyroscope for Angle Measurements" (patent pending application. UC-Berkeley Office of Technology and Licensing. Case Number 98-046-3)
  • Shkel A. M. and Howe R. T. "Surface Micromachined Rate Integrating Gyroscopes" (patent pending application. UC-Berkeley Office of Technology and Licensing. Applied 12/23/98)