If Si, thickness ≥ 100 μm; If glass (Pyrex 7740, Borofloat 33), thickness ≥ 200 μm
If yes, alignment marks must be present
Operation rate // Equipment Conditioning rate: UC-system: $48/hr // $6/hr, Non-university Entities: $120/hr // $45/hr
More information: https://mems.eng.uci.edu/services/
=