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application/pdfIEEEJournal of Microelectromechanical Systems;2019;28;1;10.1109/JMEMS.2018.2881209MEMS gyroscopefrequency symmetryQ-factorthermal robustnessMEMS Gyroscope With Concentrated Springs Suspensions Demonstrating Single Digit Frequency Split and Temperature RobustnessJoan GinerDaisuke MaedaKazuo OnoAndrei M. ShkelTomonori Sekiguchi
Journal of Microelectromechanical Systems25 Feb. 201912810.1109/JMEMS.2018.288120935
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