Intellectual Property
Below is a partial listing of the intellectual property developed within the MicroSystems Lab. For more information, please contact the UCI Office of Technology Alliances (OTA).
| UC Case No. | Date | Title | Licensing Contact |
| 2015-218 | 10/14/2014 | TRU-WAFER INTERCONNECTS FOR MEMS DOUBLE-SIDED FABRICATION PROCESS (TWIDS) | Alvin K. Viray (949) 824-3104 |
| 2015-139 | 09/24/2014 | FULLY BALANCED MICRO-MACHINED INERTIAL SENSOR | Alvin K. Viray (949) 824-3104 |
| 2014-979 | 6/9/2014 | AXI-SYMMETRIC SMALL-FOOTPRINT GYROSCOPE WITH INTERCHANGEABLE WHOLE-ANGLE AND RATE OPERATION | Alvin K. Viray (949) 824-3104 |
| 2014-612 | 2/24/2014 | UTILIZATION OF MECHANICAL QUADRATURE IN SILICON MEMS VIBRATORY GYROSCOPE TO INCREASE AND EXPAND THE LONG TERM IN-RUN BIAS IN STABILITY | Alvin K. Viray (949) 824-3104 |
| 2014-357 | 11/20/2013 | MICRO-GLASSBLOWN GYROSCOPES | Alvin K. Viray (949) 824-3104 |
| 2009-547 | 10/08/2013 | MICROMACHINED GYROSCOPES WITH 2-DOF SENSE MODES ALLOWING INTERCHANGEABLE ROBUST AND PRECISION OPERATION | Alvin K. Viray (949) 824-3104 |
| 2013-493 *** | 3/15/2013 | LEVER MECHANISMS FOR ANTI-PHASE MODE ISOLATION IN MEMS TUNING FORK STRUCTURES | Alvin K. Viray (949) 824-3104 |
| 2013-014 | 3/15/2013 | MICROFABRICATION OF HIGH QUALITY 3-D STRUCTURES USING WAFER-LEVEL GLASS BLOWING OF FUSED QUARTZ AND ULTRA LOW EXPANSION GLASSES | Alvin K. Viray (949) 824-3104 |
| 2013-013 *** | 1/28/2013 | MULTI-AXIS CHIP-SCALE MEMS INERTIAL MEASUREMENT UNIT (IMU) SYSTEM BASED ON FREQUENCY MODULATION | Alvin K. Viray (949) 824-3104 |
| 2007-376 | 12/18/2012 | SINGLE WAFER FABRICATION FOR WAVELENGTH DEPENDENT REFLECTANCE FOR LINEAR OPTICAL SERIALIZATION OF ACCELEROMETERS | Alvin K. Viray (949) 824-3104 |
| 2009-748 *** | 12/04/2012 | MICROMACHINED TUNING FORK GYROSCOPES WITH ULTRA-HIGH SENSITIVITY AND SHOCK REJECTION | Alvin K. Viray (949) 824-3104 |
| 2013-014 | 07/23/2012 | MICROFABRICATION OF HIGH QUALITY 3-D STRUCTURES USING WAFER-LEVEL GLASSBLOWING OF FUSED QUARTZ AND ULTRA LOW EXPANSION GLASSES | Alvin K. Viray (949) 824-3104 |
| 2011-199 *** | 9/16/2010 | HIGH RANGE DIGITAL ANGULAR RATE SENSOR BASED ON FREQUENCY MODULATION | Alvin K. Viray (949) 824-3104 |
| 2010-527-0 | 2/1/2010 | 3-D FOLDED MEMS TECHNOLOGY FOR MULTI-AXIS SENSOR SYSTEMS | Alvin K. Viray (949) 824-3104 |
| 2010-231-0 | 10/6/2009 | THREE-DIMENSIONAL WAFER-SCALE BATCH-MICROMACHINED ANGLE/ANGULAR RATE MICROSHELL RESONATOR GYROSCOPE | Alvin K. Viray (949) 824-3104 |
| 2008-601-01 | 3/17/2008 | MULTILAYER REFLECTIVE COATING FOR MICRO-CAVITY SIDEWALLS | Alvin K. Viray (949) 824-3104 |
| 2008-503-01 | 1/3/2008 | TEMPERATURE-ROBUST MEMS GYROSCOPE WITH 2-DOF SENSE-MODE ADDRESSING THE TRADEOFF BETWEEN BANDWITDTH AND GAIN | Alvin K. Viray (949) 824-3104 |
| 2008-125 | 8/15/2007 | FOLDED MICRO-GYROSCOPE WITH NUCLEAR MAGNETIC RESONANCE SENSING | Alvin K. Viray (949) 824-3104 |
| 2008-002 | 7/30/2007 | COMPACT ATOMIC MAGNETOMETER AND GYROSCOPE BASED ON A DIVERGING LASER BEAM | Alvin K. Viray (949) 824-3104 |
| 2007-377 *** | 1/11/2007 | A CAPACITIVE DETECTION SCHEME WITH INHERENT SELF-CALIBRATION | Alvin K. Viray (949) 824-3104 |
| 2006-519 | 3/16/2006 | GLASS BLOWING ON A WAFER SCALE | Alvin K. Viray (949) 824-3104 |
| 2006-480 | 2/27/2006 | SNAP-ACTION BISTABLE MICROMECHANISM ACTUATED BY NONLINEAR RESONANCE | Alvin K. Viray (949) 824-3104 |
| 2006-309 | 11/18/2005 | ROBUST SIX DEGREE-OF-FREEDOM MICROMACHINED GYROSCOPE WITH ANTI-PHASE DRIVE SCHEME | Alvin K. Viray (949) 824-3104 |
| 2006-176 | 9/29/2005 | WAFER-LEVEL MICRO-GLASS BLOWING | Alvin K. Viray (949) 824-3104 |
| 2006-030 | 7/18/2005 | SINGLE-MASK FABRICATION PROCESS FOR LINEAR AND ANGULAR PIEZORESISTIVE ACCELEROMETERS | Alvin K. Viray (949) 824-3104 |
| 2006-029 | 7/18/2005 | ASSEMBLY PROCESS FOR OUT-OF-PLANE MEMS AND THREE-AXIS SENSORS | Alvin K. Viray (949) 824-3104 |
| 2005-326 | 12/1/2004 | MICROMACHINED NUCLEAR MAGNETIC RESONANCE GYROSCOPE | Alvin K. Viray (949) 824-3104 |
| 2005-199 | 10/14/2004 | ROBUST MICROMACHINED GYROSCOPES WITH 2-DOF SENSE-MODE OSCILLATOR | Alvin K. Viray (949) 824-3104 |
| 2004-542 | 4/16/2004 | POST-RELEASE CAPACITANCE ENHANCEMENT METHOD IN MICROMACHINED DEVICES | Alvin K. Viray (949) 824-3104 |
| 2004-508 | 7/19/2005 | TORSIONAL NONRESONANT z-AXIS MICROMACHINED GYROSCOPES WITH NON-RESONANT ACTUATION TO MEASURE THE ANGULAR ROTATION OF AN OBJECT | Alvin K. Viray (949) 824-3104 |
| 2004-104 | 9/8/2003 | A SENSOR WITH MICRON SIZED FEATURE SIZES CAPABLE OF SIMULTANEOUSLY MEASURING ABSOLUTE ANGLES OF ROTATION AND ANGULAR ROTATIONAL RATES | Alvin K. Viray (949) 824-3104 |
| 2003-451 | 5/8/2003 | A BROAD-BAND DISTRIBUTED-MASS MICROMACHINED GYROSCOPE TO MEASURE THE ANGULAR ROTATION OF AN OBJECT | Alvin K. Viray (949) 824-3104 |
| 2003-209 | 11/25/2002 | MULTI STAGE CONTROL ARCHITECTURE FOR ERROR SUPPRESSION IN MICROMACHINED GYROSCOPES | Alvin K. Viray (949) 824-3104 |
| 2003-184 | 11/8/2002 | NON-RESONANT MICROMACHINED GYROSCOPES WITH STRUCTURAL MODE-DECOUPLING | Alvin K. Viray (949) 824-3104 |
| 2003-135 | 10/8/2002 | MICROMACHINED VIBRATORY RATE INTEGRATING GYROSCOPES, MICROMACHINED INERTIAL SENSORS | Alvin K. Viray (949) 824-3104 |
| 2001-140 | 10/19/2000 | WIDE-BANDWIDTH MICROMACHINED GYROSCOPE TO MEASURE THE ANGULAR ROTATION OF AN OBJECT | Alvin K. Viray (949) 824-3104 |
*** This case has been licensed.