Below is a partial listing of the intellectual property developed within the MicroSystems Lab. For more information, please contact the UCI Office of Technology Alliances (OTA).

Licensing contact: Alvin K. Viray (949) 824-3104

Date Patent # Title
07/31/2018 US Patent 10,036,652 Utilization of Mechanical quadrature in silicon MEMS vibratory gyroscope to increase and expand the long-term in-run bias stability

Inventors: Zotov; Sergei A., Simon, Brenton; Prikhodko; Igor P.; Trusov; Alexander A., Shkel; Andrei M.
07/11/2017 US Patent 9,702,728 Method of fabricating micro-glassblown gyroscopes

Inventors: Shkel; Andrei M., Senkal; Doruk, Ahamed; Mohammed
07/04/2017 US Patent 9,696,340 Multi-axis chip-scale MEMS inertial measurement unit (IMU) based on frequency modulation

Inventors: Trusov; Alexander A., Zotov; Sergei A., Shkel; Andrei M.
04/04/2017 US Patent 9,611,138 Through-Wafer Interconnects for MEMS Double-Sided Fabrication Process (TWIDS)

Inventors: Efimovskaya A. and Shkel; Andrei M.
08/30/2016 US Patent 9,429,428 Environmentally robust micro-wineglass gyroscope

Inventors: Shkel; Andrei, Senkal; Doruk
04/12/2016 US Patent 9,310,199 Micromachined gyroscopes with 2-DOF sense modes allowing interchangeable robust and precision operation

Inventors: Schofield; Adam, Trusov; Alexander, Shkel; Andrei
03/29/2016 US Patent 9,296,133 Method for batch fabrication of three-dimensional shells

Inventors: Shkel; Andrei M., Trusov; Alexander A., Prikhodko; Igor P., Zotov; Sergei A.
03/01/2016 US Patent 9,274,136 Multi-axis chip-scale MEMS inertial measurement unit (IMU) based on frequency modulation

Inventors: Trusov; Alexander A., Zotov; Sergei A., Shkel; Andrei M.
12/22/2015 US Patent 9,217,756 Lever mechanisms for anti-phase mode isolation in MEMS tuning-fork structures

Inventors: Simon, Brenton, Trusov A., Shkel; Andrei M.
09/22/2015 US Patent 9,139,417 Microfabrication of high quality three dimensional structures using wafer-level glassblowing of fused quartz and ultra low expansion glasses

Inventors: Trusov A., Senkal D., Shkel A.
03/31/2015 US Patent 8,991,247 High range digital angular rate sensor based on frequency modulation

Inventors: Trusov A., Zotov S., Shkel A.
08/12/2014 US Patent 8,800,370 Micromachined gyroscopes with 2-DOF sense modes allowing interchangeable robust and precision operation

Inventors: Schofield; Adam, Trusov; Alexander A., Shkel; Andrei M.
10/29/2013 US Patent 8,567,247 B2 Three-dimensional wafer-scale batch-micromachined sensor and method of fabrication for the same

Inventors: Shkel; A., Trusov; A., Prikhodko; I., Zotov; S.
10/08/2013 US Patent 8,549,915 Micromachined gyroscopes with 2-DOF sense modes allowing interchangeable robust and precision operation

Inventors: Schofield; A., Trusov; A., Shkel; A.
02/05/2013 US Patent 8,368,154 B2 Three dimensional folded MEMS technology for multi-axis sensor systems

Inventors: Trusov A., Rivers M., Zotov S., Shkel A.
12/18/2012 US Patent 8,334,984 Single wafer fabrication process for wavelength dependent reflectance for linear optical serialization of accelerometers

Inventors: Perez; M., Shkel; A.
12/04/2012 US Patent 8,322,213 Micromachined tuning fork gyroscopes with ultra-high sensitivity and shock rejection

Inventors: Trusov; Alexander A., Schofield; Adam, Shkel; Andrei M.
11/27/2012 US Patent 8,318,524 Single wafer fabrication process for wavelength dependent reflectance for linear optical serialization of accelerometers

Inventors: Perez; M., Shkel; A.
04/10/2012 US Patent 8,151,600 Self-inflated micro-glass blowing

Inventors: Eklund; Erik J., Shkel; Andrei M.
02/14/2012 US Patent 8,113,050 Robust six degree-of-freedom micromachined gyroscope with anti-phase drive scheme and method of operation of the same

Inventors: Acar; Cenk, Shkel, A. M., Schofield; Adam R., Costlow; Lynn E., Madni; Asad M.
01/10/2012 US Patent 8,094,841 Apparatus and method using capacitive detection with inherent self-calibration

Inventors: Trusov; Alexander A., Shkel, A. M.
05/10/2011 US Patent 7,939,355 Single-mask fabrication process for linear and angular piezoresistive accelerometers

Inventors: Eklund; Erik J., Shkel; Andrei M.
01/18/2011 US Patent 7,872,473 Compact atomic magnetometer and gyroscope based on a diverging laser beam

Inventors: Kitching; John, Donley; Elizabeth A., Hodby; Eleanor, Shkel, A. M., Eklund; Erik Jesper
04/13/2010 US Patent 7,694,531 Method and Apparatus for Wafer-Level Micro-Glass Blowing

Inventors: Eklund, E. J. and Shkel, A. M.
09/09/2008 US Patent 7,421,898
World Patent WO 02/088631
Torsional nonresonant z-axis micromachined gyroscope with non-resonant actuation to measure the angular rotation of an object

Inventors: Acar, C. and Shkel, A. M.
05/27/2008 US Patent 7,377,167
World Patent WO 02/066927
Nonresonant micromachined gyroscopes with structural mode-decoupling

Inventors: Acar, C. and Shkel, A. M.

Exclusively Licensed to BEI/Systron Donner Automotive, Assigned to The Regents of the University of California
10/23/2007 US Patent 7,284,430 Robust micromachined gyroscopes with two degrees of freedom sense-mode oscillator

Inventors: Acar, C. and Shkel, A. M.

Exclusively Licensed to BEI/Systron Donner Automotive, Assigned to The Regents of the University of California
10/09/2007 US Patent 7,279,761 Post-release capacitance enhancement in micromachined devices and a method of performing the same

Inventors: Acar, C. and Shkel, A. M.
09/05/2006 US Patent 7,100,446 Distributed-mass micromachined gyroscopes operated with drive-mode bandwidth enhancement

Inventors: Acar, C. and Shkel, A. M.
05/09/2006 US Patent 7,040,164 Method of simultaneously and directly generating an angular position and angular velocity measurement in a micromachined gyroscope

Inventors: Painter C. and Shkel A.M.

Exclusively Licensed to MEMSense Inc., Assigned to The Regents of the University of California
08/23/2005 US Patent 6,934,660 Multi stage control architecture for error suppression in micromachined gyroscopes

Inventors: Painter C. and Shkel A.M.
08/16/2005 US Patent 6,928,874 Dynamically amplified micromachined vibratory angle measuring gyroscopes, micromachined inertial sensors and method of operation for the same

Inventors: Painter C. and Shkel A.M.
01/25/2005 US Patent 6,845,669
World Patent WO02/08863
Non-resonant four degrees-of-freedom micromachined gyroscope

Inventors: Acar, C. and Shkel, A. M.

Exclusively Licensed to BEI/Systron Donner Automotive, Assigned to The Regents of the University of California
03/11/2003 US Patent 6,531,332 Surface micromachining using a thick release process

Inventors: Shkel A.M., Little M.
11/09/2002 US Patent 6,481,285 Micro-machined angle-measuring gyroscope

Inventors: Shkel A. M. and Howe R. T.
08/06/2002 US Patent 6,430,333 Monolithic 2D optical switch and method of fabrication

Inventors: Little M. and Shkel A. M.