Shkel A.M. “Inertial Microsensors.” Springer Publisher. MEMS Bookshelf Series, 2014. Springer Publisher. ISBN 978-0-387-35540-5

Shkel A.M. “Inertial Microsensors.” Springer Publisher. MEMS Bookshelf Series, 2014. Springer Publisher. ISBN 978-0-387-35540-5

Acar, C. and Shkel A.M. “MEMS Vibratory Gyroscopes: Structural Approaches to Improve Robustness”. Springer Publisher. (available for pre-orders, to appear in 2009) ISBN 978-0-387-09535-6

Book Chapter

Alexander A. Trusov, “Gyroscopes,” book chapter in Encyclopedia of Nanotechnology, Bharat Bhushan, Springer Netherlands, pp. 1008-1020, ISBN: 978-90-481-9751-4, 2012.

P38

Zotov; Sergei A., Simon, Brenton; Prikhodko; Igor P.; Trusov; Alexander A., Shkel; Andrei M., "Utilization of Mechanical quadrature in silicon MEMS vibratory gyroscope to increase and expand the long-term in-run bias stability ", US Patent #10,036,652 B2

P37

Shkel; Andrei M., Senkal; Doruk, Ahamed; Mohammed, "Method of fabricating micro-glassblown gyroscopes", US Patent #9,702,728 B2

P36

Trusov; Alexander A., Zotov; Sergei A., Shkel; Andrei M. , "Multi-axis chip-scale MEMS inertial measurement unit (IMU) based on frequency modulation", US Patent #9,696,340 B2

P35

Efimovskaya A. and Shkel; Andrei M., "Through-Wafer Interconnects for MEMS Double-Sided Fabrication Process (TWIDS)", US Patent #9,611,138 B2

P34

Shkel; Andrei, Senkal; Doruk , "Environmentally robust micro-wineglass gyroscope", US Patent #9,429,428 B2

P33

Schofield; Adam, Trusov; Alexander, Shkel; Andrei , "Micromachined gyroscopes with 2-DOF sense modes allowing interchangeable robust and precision operation", US Patent #9,310,199 B2

P32

Shkel; Andrei M., Trusov; Alexander A., Prikhodko; Igor P., Zotov; Sergei A. , "Method for batch fabrication of three-dimensional shells", US Patent #9,296,133 B2

P31

Trusov; Alexander A., Zotov; Sergei A., Shkel; Andrei M. , "Multi-axis chip-scale MEMS inertial measurement unit (IMU) based on frequency modulation", US Patent #9,274,136 B2

P30

Simon, Brenton, Trusov A., Shkel; Andrei M. , "Lever mechanisms for anti-phase mode isolation in MEMS tuning-fork structures", US Patent #9,217,756 B2

P29

Trusov A., Senkal D., Shkel A. , "Microfabrication of high quality three dimensional structures using wafer-level glassblowing of fused quartz and ultra low expansion glasses", US Patent #9,139,417 B2

P28

Trusov A., Zotov S., Shkel A. , "High range digital angular rate sensor based on frequency modulation", US Patent #8,991,247 B2

P27

Schofield; Adam, Trusov; Alexander A., Shkel; Andrei M. , "Micromachined gyroscopes with 2-DOF sense modes allowing interchangeable robust and precision operation", US Patent #8,800,370

P26

Trusov; Alexander A., Schofield; Adam, Shkel; Andrei M., "Temperature-robust MEMS gyroscope with 2-DOF sense-mode addressing the tradeoff between bandwidth and gain", U.S. Patent 8,656,776

P25

Shkel; A., Trusov; A., Prikhodko; I., Zotov; S. , "Three-dimensional wafer-scale batch-micromachined sensor and method of fabrication for the same", US Patent #8,567,247 B2

P24

Schofield; A., Trusov; A., Shkel; A. , "Micromachined gyroscopes with 2-DOF sense modes allowing interchangeable robust and precision operation", US Patent #8,549,915 B2

P23

Trusov; Alexander A., Schofield; Adam, Shkel; Andrei M., "Temperature-robust MEMS gyroscope with 2-DOF sense-mode addressing the tradeoff between bandwidth and gain", U.S. Patent 8,443,667 B2

P22

Trusov A., Rivers M., Zotov S., Shkel A. , "Three dimensional folded MEMS technology for multi-axis sensor systems", US Patent #8,368,154 B2

P21

Perez; M., Shkel; A. , "Single wafer fabrication process for wavelength dependent reflectance for linear optical serialization of accelerometers", US Patent #8,334,984

P20

Trusov; Alexander A., Schofield; Adam, Shkel; Andrei M. , "Micromachined tuning fork gyroscopes with ultra-high sensitivity and shock rejection", US Patent #8,322,213

P19

Perez; M., Shkel; A. , "Single wafer fabrication process for wavelength dependent reflectance for linear optical serialization of accelerometers", US Patent #8,318,524

P18

Eklund; Erik J., Shkel; Andrei M. , "Self-inflated micro-glass blowing", US Patent #8,151,600

P17

Acar; Cenk, Shkel, A. M., Schofield; Adam R., Costlow; Lynn E., Madni; Asad M. , "Robust six degree-of-freedom micromachined gyroscope with anti-phase drive scheme and method of operation of the same", US Patent #8,113,050

P16

Trusov; Alexander A., Shkel, A. M. , "Apparatus and method using capacitive detection with inherent self-calibration", US Patent #8,094,841

P15

Eklund; Erik J., Shkel; Andrei M. , "Single-mask fabrication process for linear and angular piezoresistive accelerometers", US Patent #7,939,355

P14

Kitching; John, Donley; Elizabeth A., Hodby; Eleanor, Shkel, A. M., Eklund; Erik Jesper , "Compact atomic magnetometer and gyroscope based on a diverging laser beam", US Patent #7,872,473

P13

Eklund, E. J. and Shkel, A. M. , "Method and Apparatus for Wafer-Level Micro-Glass Blowing", US Patent #7,694,531

P12

Acar, C. and Shkel, A. M. , "Torsional nonresonant z-axis micromachined gyroscope with non-resonant actuation to measure the angular rotation of an object", US Patent #7,421,898 (World Patent WO 02/088631)

P11

Acar, C. and Shkel, A. M. , "Nonresonant micromachined gyroscopes with structural mode-decoupling", US Patent #7,377,167 (World Patent WO 02/066927). Exclusively Licensed to BEI/Systron Donner Automotive, Assigned to The Regents of the University of California. (approved: January 25, 2005)

P10

Acar, C. and Shkel, A. M. , "Robust micromachined gyroscopes with two degrees of freedom sense-mode oscillator", US Patent #7,284,430 Exclusively Licensed to BEI/Systron Donner Automotive, Assigned to The Regents of the University of California.

P9

Acar, C. and Shkel, A. M. , "Post-release capacitance enhancement in micromachined devices and a method of performing the same", US Patent #7,279,761

P8

Acar, C. and Shkel, A. M. , "Distributed-mass micromachined gyroscopes operated with drive-mode bandwidth enhancement", US Patent #7,100,446

P7

Painter C. and Shkel A.M. , "Method of simultaneously and directly generating an angular position and angular velocity measurement in a micromachined gyroscope", US Patent #7,040,164

P6

Painter C. and Shkel A.M. , "Multi stage control architecture for error suppression in micromachined gyroscopes", US Patent #6,934,660

P5

Painter C. and Shkel A.M. , "Dynamically amplified micromachined vibratory angle measuring gyroscopes, micromachined inertial sensors and method of operation for the same", US Patent #6,928,874

P4

Acar, C. and Shkel, A. M. , "Non-resonant four degrees-of-freedom micromachined gyroscope", US Patent #6,845,669 (World Patent WO02/08863) Exclusively Licensed to BEI/Systron Donner Automotive, Assigned to The Regents of the University of California.

P3

Shkel A.M., Little M. , "Surface micromachining using a thick release process", US Patent #6,531,332

P2

Shkel A. M. and Howe R. T. , "Micro-machined angle-measuring gyroscope", US Patent #6,481,285

P1

Little M. and Shkel A. M. , "Monolithic 2D optical switch and method of fabrication", US Patent #6,430,333


Papers

Journal Papers

J61

Yusheng Wang, Daryosh Vatanparvar, Andrei Chernyshoff and Andrei M. Shkel, “Analytical Closed-Form Estimation of Position Error on ZUPT-Augmented Pedestrian Inertial Navigation”, IEEE Sensors Letters. doi: 10.1109/LSENS.2018.2879315

J60

Radwan M. Noor and Andrei M. Shkel, “MEMS Components for NMR Atomic Sensors”, IEEE Journal of Microelectromechanical Systems (JMEMS), Vol. 27, No. 6, pp. 1148-1159, Dec. 2018.

J59

J. Giner, D. Maeda, K. Ono, A.M. Shkel, T. Sekiguchi, “MEMS Gyroscope with Concentrated Springs Suspensions Demonstrating Single Digit Frequency Split and Temperature Robustness”, IEEE Journal of Microelectromechanical Systems (JMEMS). doi: 10.1109/JMEMS.2018.2881209

J58

Yusheng Wang, Mohammad H. Asadian, and Andrei Shkel, “Compensation of Frequency Split by Directional Lapping in Fused Quartz Micro Wineglass Resonators”, Journal of Micromechanics and Microengineering, Vol. 28, pp. 095001, May 2018.

J57

Alexandra Efimovskaya, Yu-Wei Lin, Andrei M. Shkel, “Double-Sided Process for MEMS SOI Sensors With Deep Vertical Thru-Wafer Interconnects”, IEEE/ASME Journal of Microelectromechanical Systems, Vol. 27, No. 2, pp. 239-249, April 2018.

J56

Mohammad H. Asadian, Sina Askari, Andrei Shkel, “An ultra-high vacuum packaging process demonstrating over 2 million Q-factor in MEMS vibratory gyroscopes”, IEEE Sensors Letters, Vol. 1, Issue 6, December 2017.

J55

Yusheng Wang, Mohammad H. Asadian, and Andrei M. Shkel. “Modeling the Effect of Imperfections in Glassblown Micro-Wineglass Fused Quartz Resonators.” ASME Journal of Vibration and Acoustics 139.4 (2017): 040909.

J54

Alexandra Efimovskaya, Yu-Wei Lin, Andrei M. Shkel, “Origami-Like 3-D Folded MEMS Approach for Miniature Inertial Measurement Unit”, IEEE/ASME Journal of Microelectromechanical Systems, vol.26, no.5, pp.1030 – 1039, Oct 2017.

Conference Papers

C170

Mohammad H. Asadian, Yusheng Wang, and Andrei M. Shkel, “Design and Fabrication of 3D Fused Quartz Shell Resonators for Broad Range of Frequencies and Increased Decay Time”, IEEE Sensors 2018 Conference, Oct 29-31, New Delhi, India, 2018.

C169

Mohammad H. Asadian, Sina Askari, Ian B. Flader, Yunhan Chen, Dustin D. Gerrard, Dongsuk D. Shin, Hyun-Keun Kwon, Thomas W. Kenny, and Andrei M. Shkel, “High Quality Factor Mode Ordered Dual Foucault Pendulum Gyroscope”, IEEE Sensors 2018 Conference, IEEE Sensors 2018 Conference, Oct 29-31, New Delhi, India, 2018.

C168

Yusheng Wang, Andrei Chernyshoff, and Andrei M. Shkel, (2018) “Error Analysis of ZUPTAided Pedestrian Inertial Navigation”, 2018 International Conference on Indoor Positioning and Indoor Navigation (IPIN), 24-27 September, Nantes, France (2018).

C167

Alexandra Efimovskaya and Andrei M. Shkel, (2018) “Multi-Degree-of-Freedom MEMS Coriolis Vibratory Gyroscopes Designed for Dynamic Range, Robustness, and Sensitivity”, 2018 DGON Inertial Sensors and Systems (ISS) – Symposium Gyro Technology, Braunschweig, Germany, 11-12 September, (2018).

C166

Yusheng Wang, Yu-Wei Lin, Janna Rodriguez, Gabrielle D. Vukasin, Dongsuk D. Shin, Hyun-Keun Kwon, David B. Heinz, Yunhan Chen, Dustin D. Gerrard, Thomas W. Kenny, and Andrei M. Shkel, “On Decoupled Quantification of Energy Dissipation Mechanisms in Toroidal Ring Gyroscopes”, Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2018), Hilton Head Island, South Carolina, USA, June 3-7, (2018).

C165

Sina Askari, Alessandro Presacco, Ronald Sahyouni, Hamid Djalilian, Andrei M. Shkel, Harrison W. Lin, “Closed loop microfabricated facial reanimation device coupling EMG-driven facial nerve stimulation with a chronically implanted multichannel cuff electrode”, IEEE EMBC, Honolulu, HI, USA, July 17 – 21, (2018).

C164

Sina Askari, Mohammad H. Asadian, Andrei M. Shkel, “High Quality Factor MEMS Gyroscope with Whole Angle Mode of Operation”, IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), Lake Como, Italy, March 26 – 29, (2018).

C163

Daryosh Vatanparvar, Andrei M. Shkel, “Effect of Fabrication Imperfections on Energy Loss through Mechanical Mode Coupling in MEMS”, IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), Lake Como, Italy, March 26 – 29, (2018).

C162

Sina Askari, Mohammad H. Asadian, Andrei M. Shkel, “Performance Requirements of MEMS based Vestibular Prosthesis”, BMES, Phoenix, USA, Oct 11-14, 2017

C161

Danmeng Wang, Mohammad H. Asadian, Alexandra Efimovskaya, Andrei M. Shkel, "A Comparative Study of Conventional Single-Mass and Amplitude Amplified Dual-Mass MEMS Vibratory Gyroscopes", IEEE Inertial Sensors 2017, Kauai, HI, USA, March 27 – 30, (2017).

C160

Yusheng Wang, Mohammad H. Asadian, and Andrei M. Shkel, “Frequency Split Reduction by Directional Lapping of Fused Quartz Micro Wineglass Resonators”, IEEE Inertial Sensors 2017, Kauai, HI, USA, March 27 – 30, (2017).

C159

Yu-Wei Lin, Alexandra Efimovskaya, and Andrei M. Shkel, “Study of Environmental Survivability and Stability of Folded MEMS IMU”, IEEE Inertial Sensors 2017, Kauai, HI, USA, March 27 – 30, (2017).

C158

Mohammad H. Asadian, Yusheng Wang, Sina Askari and Andrei M. Shkel, “Controlled Capacitive Gaps for Electrostatic Actuation and Tuning of 3D Fused Quartz Micro Wineglass Resonator Gyroscope”, IEEE Inertial Sensors 2017, Kauai, HI, USA, March 27 – 30, (2017).

C157

Radwan M. Noor, Venu Gundeti, and Andrei M. Shkel, “A Status on Components Development for Folded Micro NMR Gyro”, IEEE Inertial Sensors 2017, Kauai, HI, USA, March 27 – 30, (2017).

C156

Alexandra Efimovskaya, Yushi Yang, Eldwin Ng, Yunhan Chen, Ian Flader, Thomas W. Kenny, and Andrei M. Shkel, “Compact Roll-Pitch-Yaw Gyroscope Implemented in Wafer-level Epitaxial Silicon Encapsulation Process”, IEEE Inertial Sensors 2017, Kauai, HI, USA, March 27 – 30, (2017).

C155

Alexandra Efimovskaya, Yu-Wei Lin, Danmeng Wang, and Andrei M. Shkel, “Electrostatic Compensation of Structural Imperfections in Dynamically Amplified Dual-Mass Gyroscope”, IEEE Inertial Sensors 2017, Kauai, HI, USA, March 27 – 30, (2017).

C154

A. Efimovskaya, Y.-W. Lin, Y. Yang, E. Ng, Y. Chen, I. Flader,C.H. Ahn, V. Hong, T.W. Kenny, and A.M. Shkel, “On Cross-Talk Between Gyroscopes Integrated on a Folded MEMS IMU Cube”, IEEE MEMS 2017, Las Vegas, NV, USA, January 22-26, 2017.

C153

J. Giner, Y. Zhang, D. Maeda, K. Ono, A.M. Shkel, and T. Sekiguchi, “Dynamically Balanced Degenerate Mode Gyro with Sub-Hz Frequency Symmetry and Temperature Robustness”, IEEE MEMS 2017, Las Vegas, NV, USA, January 22-26, 2017.

Journal Papers

J53

Sergei A. Zotov, Brenton R. Simon, Alexander A. Trusov, and Andrei M. Shkel, "High Quality Factor Resonant MEMS Accelerometer With Continuous Thermal Compensation," IEEE Sensors Journal, vol.15, no.9, pp.5045 – 5052, Sept. 2015

J52

Mohammed J. Ahamed, Doruk Senkal, Alexander A. Trusov, and Andrei M. Shkel, “Study of High Aspect Ratio NLD Plasma Etching and Postprocessing of Fused Silica and Borosilicate Glass”, IEEE/ASME Journal of Microelectromechanical Systems, vol.44, no.4, pp. 790-800, August 2015.

J51

Doruk Senkal, Mohammed J. Ahamed, Mohammad A. Asadian Ardakani, Sina Askari and Andrei M. Shkel, “Demonstration of 1 Million Q-Factor on Microglassblown Wineglass Resonators With Out-of-Plane Electrostatic Transduction”, IEEE/ASME Journal of Microelectromechanical Systems, 24 (1), pp. 29-37, February 2015.

Conference Papers

C152

Alexandra Efimovskaya, Danmeng Wang, Yu-Wei Lin, and Andrei M. Shkel, “On Ordering of Fundamental Wineglass Modes in Toroidal Ring Gyroscope”, IEEE Sensors 2016, Orlando, FL, USA, Oct30-Nov2, 2016.

C151

Yusheng Wang, Mohammad Asadian, Andrei Shkel, “Predictive Analytical Model of Fundamental Frequency and Imperfections in Glassblown Fused Quartz Hemi-Toroidal 3D Micro Shells”, IEEE Sensors 2016, Orlando, FL, USA, Oct30-Nov2, 2016.

C150

Sina Askari, Mohammad H. Asadian, Kasra Kakavand, Andrei M. Shkel, “Near-Navigation Grade Quad Mass Gyroscope with Q-factor Limited by Thermo-Elastic Damping”, Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2016), Hilton Head Island, South Carolina, USA, June 5-9, 2016.

C149

Alexandra Efimovskaya, Yu-Wei Lin, Andrei M. Shkel, “Thru-Wafer Interconnects for Double-Sided (TWIDS) Fabrication of MEMS”, IEEE Inertial Sensors, Laguna Beach, CA, USA, 22-25 February, 2016.

C148

Sina Askari, Mohammad H. Asadian, Kasra Kakavand, Andrei M. Shkel, “Vacuum Sealed and Getter Activated MEMS Quad Mass Gyroscope Demonstrating Better Than 1.2 Million Quality Factor”, IEEE Inertial Sensors, Laguna Beach, CA, 22-25 February, 2016.

C147

Yusheng Wang, Andrei M. Shkel, “Study on Surface Roughness Improvement of Fused Quartz After Thermal and Chemical Post-Processing”, IEEE Inertial Sensors, Laguna Beach, CA, USA, 22-25 February, 2016.

C146

Brenton R. Simon, Sambuddha Khan, Alexander A. Trusov, Andrei M. Shkel, “Mode ordering in tuning fork structures with negative structural coupling for mitigation of common-mode g-sensitivity”, in SENSORS, 2015 IEEE, Busan, South Korea, 1-4 Nov, 2015.

C145

Yusheng Wang, Andrei M. Shkel, “Near-Zero Power Wake UP System Enabled by Ultra High Q-Factor Array of MEMS Resonators”, 4th International Symposium on Energy Challenges and Mechanics – working on small scales (ECM4), Aberdeen, Scotland, United Kingdom, 11-13 August, 2015.

C144

Alexandra Efimovskaya, Doruk Senkal, Andrei M. Shkel, “Miniature origami-like folded MEMS TIMU”, IEEE Transducers 2015 Conference 2015, Anchorage, Alaska, USA, June 21-25, 2015. (Best Paper Award)

C143

Doruk Senkal, Alexandra Efimovskaya, Andrei M. Shkel, “Dual Foucault pendulum gyroscope”, IEEE Transducers 2015 Conference 2015, Anchorage, Alaska, USA, June 21-25, 2015.

C142

Doruk Senkal, Alexandra Efimovskaya, Andrei M. Shkel, “Minimal realization of dynamically balanced lumped mass WA gyroscope: dual foucault pendulum”, IEEE International Symposium in Inertial Sensors and Systems (ISISS) 2015, Hawaii, USA, March 23-26, 2015.

C141

Alexandra Efimovskaya, Doruk Senkal, Sina Askari, Andrei M. Shkel, “Origami-like folded mems for realization of TIMU: fabrication technology and initial demonstration”, IEEE International Symposium in Inertial Sensors and Systems (ISISS) 2015, Hawaii, USA, March 23-26, 2015

C140

Joan Giner, Andrei M. Shkel, “The concept of “collapsed electrodes” for glassblown spherical resonators demonstrating 200:1 aspect ratio gap definition”, IEEE International Symposium in Inertial Sensors and Systems (ISISS) 2015, Hawaii, USA, March 23-26, 2015.

C139

Doruk Senkal, E.J. Ng, V. Hong, Y.Yang, C.H. Ahn, Thomas W. Kenny, Andrei M. Shkel, “Parametric Drive of a Toroidal MEMS Rate Integrating Gyroscope Demonstrating < 20 ppm Scale Factor Stability”, IEEE MEMS 2015, Estoril, Portugal, January 18-22, 2015.

C138

J. Giner, J.M. Gray, J. Gertsch, Victor M. Bright, Andrei M. Shkel, “Design, Fabrication, and Characterization of a Micromachined Glass-Blown Spherical Resonator with In-Situ Integrated Silicon Electrodes and ALD Tungsten Interior Coating”, IEEE MEMS 2015, Estoril, Portugal, January 18-22, 2015.

Journal Papers

J50

Doruk Senkal, Mohammed J. Ahamed, Alexander Trusov, and Andrei M. Shkel, “Electrostatic and Mechanical Characterization of 3-D Micro-wineglass Resonators”, Sensors and Actuators A: Physical, 215, pp. 150-154, 15 August 2014.

J49

Sergei A. Zotov, Brent R. Simon, Igor P. Prikhodko, Alexander A. Trusov, Andrei M. Shkel, “Quality Factor Maximization through Dynamic Balancing of Tuning Fork Resonator” IEEE Sensors Journal, IEEE Sensors Journal, VOL. 14, NO. 8, pp. 2706 – 2714, August 2014.

J48

D. Senkal, M. J. Ahamed, A. A. Trusov, and A. M. Shkel, “Achieving Sub-Hz Frequency Symmetry in Micro-Glassblown Wineglass Resonators”, Journal of Microelectromechanical Systems, vol. 23, no. 1, pp. 30–38, 2014.

J47

Igor P. Prikhodko, Sergei A. Zotov, Alexander A. Trusov, Andrei M. Shkel, “What is MEMS Gyrocompassing? Comparative Analysis of Maytagging and Carouseling”, IEEE/ASME Microelectromech. Syst. J., vol. 22, no. 6, pp. 1257-1266 Dec. 2013

J46

Andrei M. Shkel, “Expert Advice: the Chip-Scale Combinatorial Atomic Navigator”, GPS World, August 2013.

J45

Doruk Senkal, Mohammed J. Ahamed, Alexander A. Trusov, Andrei M. Shkel, “High Temperature Micro-glassblowing Process Demonstrated on Fused Quartz and ULE TSG” Sensors and Actuators A: Physical, 2013.

J44

Igor P. Prikhodko, Alexander A. Trusov, Andrei M. Shkel, “Compensation of drifts in high-Q MEMS gyroscopes using temperature self-sensing” Sensors and Actuators A: Physical, 2013.

Conference Papers

C137

Alexandra Efimovskaya, Andrei M. Shkel, “160 Milli-Ohm Electrical Resistance Thru-Wafer Interconnects with 10:1 Aspect Ratio”. IMAPS 2014 Conference, October 13-16, San Diego,CA, 2014

C136

Doruk Senkal, Mohammed J. Ahamed, Mohammad H. Asadian, Sina Askari, Andrei M. Shkel, “Out-of-plane electrode architecture for fused silica micro-glassblown 3-D wineglass resonators”. IEEE Sensors 2014 Conference, pp. 994 – 997, November 2-5, Valencia, Spain, 2014

C135

Jie Han, Sergei A. Zotov, Brenton R. Simon, Igor P. Prikhodko, Gunjana Sharma, Alexander A. Trusov, Andrei M. Shkel, “Electrostatic stabilization of thermal variation in quality factor using anchor loss modulation”. IEEE Sensors 2014 Conference, pp. 998 – 1001, November 2-5, Valencia, Spain, 2014

C134

Sergei A. Zotov, Igor P. Prikhodko, Brenton, R. Simon, Alexander A. Trusov, Andrei M. Shkel, “Self-Calibrated MEMS Gyroscope with AM/FM Operational Modes, Dynamic Range of 180 dB, and In-Run Bias Stability of 0.1 deg/hr”, Inertial Sensors and Systems – Symposium Gyro Technology 2014, Karlsruhe, Germany, September 16-17, 2014

C133

Doruk Senkal, Mohammad J. Ahamed, Sina Askari, Andrei M. Shkel, “MEMS Micro-Glassblowing Paradigm for Wafer-Level Fabrication of Fused Silica Wineglass Gyroscopes”, Eurosensors 2014, Brescia, Italy, September 7-10, 2014

C132

Alexander Trusov, David Rozelle, Grant Atikyan, Brenton Simon, Sergei Zotov, Andrei Shkel, Douglas Meyer, “Flat Is Not Dead: Current and Future Performance of Si-MEMS Quad Mass Gyro (QMG) System”, ION JNC 2014, Orlando, FL, USA, June 16-18, 2014

C131

Alexander Trusov, David Rozelle, Grant Atikyan, Brenton Simon, Sergei Zotov, Andrei Shkel, Douglas Meyer, “Flat Is Not Dead: Current and Future Performance of Si-MEMS Quad Mass Gyro (QMG) System”, IEEE/ION PLANS 2014, Monterey, CA, USA, May 6-7, 2014

C130

Doruk Senkal, Mohammed Jalal Ahamed, Sina Askari, Andrei Shkel, “1 Million Q-Factor Demonstrated on Micro-Glassblown Fused Silica Wineglass Resonators with Out-of-Plane Electrostatic Transduction”, Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head Island, South Carolina, USA, June 8-12, 2014.

C129

Sergei Zotov, Brenton Simon, Gunjana Sharma, Jie Han, Igor Prikhodko, Alexander Trusov, Andrei Shkel, “Investigation of Energy Dissipation in Low Frequency Vibratory MEMS Demonstrating a Resonator with 25 Minutes Time Constant”, Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head Island, South Carolina, USA, June 8-12, 2014.

C128

Alexander Trusov, David Rozelle, Grant Atikyan, Sergei Zotov, Brenton Simon, Andrei Shkel, Douglas Meyer, “Non-Axisymmetric Coriolis Vibratory Gyroscope with Whole Angle, Force REbalance, and Self-Calibration”, Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2014), Hilton Head Island, SC, USA, June 8-12, 2014.

C127

Alexander Trusov, G. Atikyan, D.M. Rozelle, A.D. Meyer, Sergei Zotov, Brenton Simon, Andrei Shkel, “Force Rebalance, Whole Angle, and Self-Calibration Mechanization of Silicon MEMS Quad Mass Gyro”, IEEE ISISS 2014, Laguna Beach, CA, USA, February 25-26, 2014.

C126

Sergei Zotov, Brenton Simon, Gunjana Sharma, Alexander Trusov, Andrei Shkel, “Utilization of Mechanical Quadrature in Silicon MEMS Vibratory Gyroscope to Increase and Expand the Long Term In-Run Bias Stability”, IEEE ISISS 2014, Laguna Beach, CA, USA, February 25-26, 2014.

C125

Mohammed Jalal Ahamed, Doruk Senkal, Andrei Shkel, “Improvement of Side-wall Roughness in Deep Glass Etched MEMS Vibratory Sensors”, IEEE ISISS 2014, Laguna Beach, CA, USA, February 25-26, 2014.

C124

Brenton Simon, Gunjana Sharma, Sergei Zotov, Alexander Trusov, Andrei Shkel, “Intrinsic Stress of Eutectic Au/Sn Die Attachment and Effect on Mode-Matched MEMS Gyroscopes”, IEEE ISISS 2014, Laguna Beach, CA, USA, February 25-26, 2014.

C123

Igor Prikhodko, Alexander Trusov, Andrei Shkel, “Comparative Analysis of Nuclear Magnetic Resonance and Whole Angle Coriolis Vibratory Gyroscopes”, IEEE ISISS 2014, Laguna Beach, CA, USA, February 25-26, 2014.

C122

Sergei Zotov, Igor Prikhodko, Brenton Simon, Alexander Trusov, Andrei Shkel, “Optimization of Orbital Trajectory for Frequency Modulated Gyroscope”, IEEE ISISS 2014, Laguna Beach, CA, USA, February 25-26, 2014.

C121

Mohammed Jalal Ahamed, Doruk Senkal, Andrei Shkel, “Effect of Annealing on Mechanical Quality Factor of Fused Quartz Hemispherical Resonator”, IEEE ISISS 2014, Laguna Beach, CA, USA, February 25-26, 2014.

C120

Joan Giner, Lorenzo Valdevit, Andrei Shkel, “Glass-Blown Pyrex Resonator with Compensating Ti Coating for Reduction of TCF”, IEEE ISISS 2014, Laguna Beach, CA, USA, February 25-26, 2014.

C119

Doruk Senkal, Mohammed Jalal Ahamed, Andrei Shkel, “Design and Modeling of Micro-glassblown Inverted-wineglass Structures”, IEEE ISISS 2014, Laguna Beach, CA, USA, February 25-26, 2014.

C118

Doruk Senkal, Sina Askari, Mohammed J. Ahamed, Eldwin Ng, Vu Hong, Yushi Yang, Chae Hyuck Ahn, Thomas W. Kenny, Andrei M. Shkel, “100k Q-Factor Toroidal Ring Gyroscope Implemented in Wafer-level Epitaxial Silicon Encapsulation Process”, IEEE MEMS 2014, San Francisco, CA, USA, January 26-30, 2014.

C117

Mohammed J. Ahamed, Doruk Senkal, Alexander A. Trusov and Andrei M. Shkel, “Deep NLD Plasma Etching of Fused Silica and Borosilicate Glass”, IEEE Sensors 2013 Conference, pp. 1767-1770, November 4-6, Baltimore, Maryland, USA, 2013.

C116

Igor P. Prikhodko, Brenton R. Simon, Gunjana Sharma, Sergei A. Zotov, Alexander A. Trusov, and Andrei M. Shkel, “High and Moderate Level Vacuum Packaging of Vibratory MEMS”, 46-th International Symposium on Microelectronics (IMAPS 2013), Orlando, FL, USA, September 30 – October 3, 2013.

C115

D.Senkal, M.J.Ahamed, A.A.Trusov, A.M. Shkel, “Demonstration of Sub-1Hz Structural Symmetry in Micro-Glassblown Wineglass Resonators with Integrated Electrodes”, IEEE Transducers 2013 Conference, Barcelona,Spain June 16–20, 2013.

C114

A.A.Trusov, I.P.Prikhodko, D.M.Rozelle, A.D.Meyer, A.M. Shkel, “1 PPM Precision Self-Calibration of Scale Factor in MEMS Coriolis Vibratory Gyroscopes”, IEEE Transducers 2013 Conference, Barcelona,Spain June 16–20, 2013.

C113

Alexander A. Trusov, Sergei A. Zotov, Brenton R. Simon, Andrei M. Shkel, “Silicon Accelerometer with Differential Frequency Modulation and Continuous Self-Calibration”, IEEE MEMS 2013 Conference, Taipei, Taiwan, January 20 – 24, 2013.

C112

Doruk Senkal, Mohammed J. Ahamed, Alexander A. Trusov, Andrei M. Shkel, “Adaptable Test-bed for Characterization of Micro-wineglass Resonators”, IEEE MEMS 2013 Conference, Taipei, Taiwan, January 20 – 24, 2013.

Journal Papers

J43

Andrei M. Shkel “Microtechnology Comes of Age”, GPS World, pp. 43-50, September 2011.

J42

Sergei A. Zotov, Alexander A. Trusov, Andrei M. Shkel, “Three-Dimensional Spherical Shell Resonator Gyroscope Fabricated Using Wafer-Scale Glassblowing”, IEEE JMEMS Letters, In Press, Available online 23 March 2012.

J41

Sergei A. Zotov, Alexander A. Trusov, Andrei M. Shkel, “High-Range Angular Rate Sensor Based on Mechanical Frequency Modulation”, IEEE/ASME Journal of Microelectromechanical Systems, vol. 21, no. 2, pp. 398-405, April 2012.

J40

Igor P. Prikhodko, Sergei A. Zotov, Alexander A. Trusov, Andrei M. Shkel, “Foucault pendulum on a chip: Rate integrating silicon MEMS gyroscope”, Sensors and Actuators A: Physical, Vol. 177, pp. 67–78, April 2012.

J39

Sergei A. Zotov, Montgomery C. Rivers, Alexander A. Trusov, Andrei M. Shkel, “Folded MEMS Pyramid Inertial Measurement Unit”, IEEE Sensors Journal, vol. 11, no. 11, pp. 2780-2789, November 2011.

J38

Alexander A. Trusov, Igor P. Prikhodko, Sergei A. Zotov, Andrei M. Shkel, “Low-Dissipation Silicon MEMS Tuning Fork Gyroscopes for Rate and Whole Angle Measurements”, IEEE Sensors Journal, vol. 11, no. 11, pp. 2763-2770, November 2011.

J37

Igor P.Prikhodko, Sergei A. Zotov, Alexander A. Trusov and Andrei M. Shkel, “Microscale Glass-Blown Three-Dimensional Spherical Shell Resonators”, IEEE/ASME Journal of Microelectromechanical Systems, vol.20, no.3, pp.691-701, June 2011.

J36

Adam R. Schofield, Alexander A. Trusov, Andrei M. Shkel, “Micromachined Gyroscope Concept Allowing Interchangeable Operation in Both Robust and Precision Modes”, Sensors and Actuators A: Physical, Vol. 165, Issue 1, pp, 35–42, January 2011.

J35

Alexander A. Trusov, Adam R. Schofield, Andrei M. Shkel, “Micromachined rate gyroscope architecture with ultra-high quality factor and improved mode ordering”, Sensors and Actuators A: Physical, Vol. 165, Issue 1, pp. 26-34, January 2011.

Conference Papers

C111

Igor P. Prikhodko, Sergei A. Zotov, Alexander A. Trusov, and Andrei M. Shkel, “Thermal Calibration of Silicon MEMS Gyroscopes”, IMAPS 8th International Conference and Exhibition on Device Packaging, Scottsdale, AZ, USA, March 5 – 8, 2012.

C110

Igor P. Prikhodko, Alexander A. Trusov, Andrei M. Shkel, "Achieving Long-Term Bias Stability in High-Q Inertial MEMS by Temperature Self-Sensing with a 0.5 Millicelcius Precision”, Solid-State Sensors, Actuators, and Microsystems Workshop 2012, Hilton Head Island, South Carolina, USA, June 3-7, 2012.

C109

Doruk Senkal, Christopher R. Raum, Alexander A. Trusov, Andrei M. Shkel, “Titania Silicate / Fused Quartz Glassblowing for 3-D Fabrication of Low Internal Loss Wineglass Micro-structures”, Solid-State Sensors, Actuators, and Microsystems Workshop 2012, Hilton Head Island, South Carolina, USA, June 3-7, 2012.

C108

Alexander A. Trusov, Igor P. Prikhodko, Sergei A. Zotov, and Andrei M. Shkel, “High-Q and Wide Dynamic Range Inertial MEMS for North-Finding and Tracking Applications”, IEEE/ION Position Location and Navigation Symposium (PLANS 2012), Myrtle Beach, SC, April 24-26, 2012.

C107

Igor P. Prikhodko, Alexander A. Trusov, and Andrei M. Shkel, “North-Finding with 0.004 Radian Precision Using a Silicon MEMS Quadruple Mass Gyroscope with Q-Factor of 1 Million”, IEEE MEMS 2012 Conference, Paris, France, Jan 28-Feb 2, 2012.

C106

Alexander A. Trusov, Sergei A. Zotov, and Andrei M. Shkel, “Electrostatic Regulation of Quality Factor in Tuning Fork MEMS”, IEEE Sensors 2011 Conference, Limerick, Ireland, October 28 – 31, 2011.

C105

Sergei A. Zotov, Alexander A. Trusov, and Andrei M. Shkel, “Experimental Demonstration of a Wide Dynamic Range Angular Rate Sensor Based on Frequency Modulation” IEEE Sensors 2011 Conference, Limerick, Ireland, October 28 – 31, 2011.

C104

Doruk Senkal, Igor P. Prikhodko, Alexander A. Trusov, and Andrei M. Shkel, “Micromachined 3-D Glass-Blown Wineglass Structures for Vibratory MEMS Applications”, Technologies or Future Micro-Nano Manufacturing, Napa, California, USA, August 8 – 10, 2011.

C103

Andrei M. Shkel “Invited: Precision Navigation and Timing Enabled by Microtechnology: Are We There Yet?”, SPIE Defense and Security Sensing, Micro- and Nanotechnology Sensing, Volume 8031, 25-29 April 2011, Orlando, Florida, US.

C102

Alexander A. Trusov, Igor P. Prikhodko, Sergei A. Zotov, Brenton R. Simon, Luis G. Andrade, Camille A. Ward, and Andrei M. Shkel, “Development of a Single-Chip MEMS Gyrocompass”, Institute of Navigation Joint Navigation Conference (ION JNC), Colorado Springs, Colorado, USA, June 27-30, 2011.

C101

Igor P. Prikhodko, Sergei A. Zotov, Alexander A. Trusov, and Andrei M. Shkel, “Sub-Degree-per-Hour Silicon MEMS Rate Sensor with 1 Million Q-Factor”, Transducers 2011 Conference, Beijing, China, June 3-9, 2011.

C100

Alexander A. Trusov, Igor P. Prikhodko, Sergei A. Zotov, and Andrei M. Shkel, “Design and Packaging of Ultra-High Q-Factor MEMS for Inertial Applications”, IMAPS 7th International Conference and Exhibition on Device Packaging, Scottsdale, AZ, USA, March 8 – 10, 2011.

C99

Adam R. Schofield, Alexander A. Trusov, and Andrei M. Shkel, “Permanent Attachment of Silicon Structures via Joule Heat Induced Welding”, IMAPS 7th International Conference and Exhibition on Device Packaging, Scottsdale, AZ, USA, March 8 – 10, 2011.

C98

Igor P. Prikhodko, Sergei A. Zotov, Alexander A. Trusov, Andrei M. Shkel, “Foucault Pendulum on a Chip: Angle Measuring Silicon MEMS Gyroscope”, IEEE MEMS 2011, Conference, Cancun, Mexico, January 23 – 27, 2011.

C97

Sergei A. Zotov, Igor P. Prikhodko, Alexander A. Trusov, Andrei M. Shkel, “Frequency Modulation Based Angular Rate System”, IEEE MEMS 2011, Conference, Cancun, Mexico, January 23 – 27, 2011.

Journal Papers

J34

Cenk Acar, Adam R. Schofield, Alexander A. Trusov, Lynn E. Costlow and Andrei M. Shkel, “Environmentally Robust MEMS Vibratory Gyroscopes for Automotive Applications”, IEEE Sensors Journal, Vol. 9, No. 12, pp. 1895-1906, 2009

J33

Maximillian A. Perez, John Kitching, and Shkel A.M “Design and Demonstration of PECVD Multilayer Dielectric Mirrors Optimized for Micromachined Cavity Angled Sidewalls”, Sensors and Actuators A: Physical, volume 155 (2009), pp.23-32

J32

Maximilian A. Perez, Uyen Nguyen, Svenja Knappe, Elizabeth A. Donley, John Kitching, and Shkel A.M. “Rubidium Vapor Cell with Integrated Bragg Reflectors for Compact Atomic MEMS” Sensors and Actuators A: Physical. Volume 154, Issue 2, 24 September 2009, Pages 295–303

J31

Alexander A. Trusov, Adam R. Schofield, and Andrei M. Shkel, “Performance Characterization of a New Temperature-Robust Gain-Bandwidth Improved MEMS Gyroscope Operated in Air”, Sensors and Actuators A: Physical, Vol. 155, Issue 1, pp. 16-22, 2009

Conference Papers

C96

Alexander A. Trusov, Igor P. Prikhodko, Sergei A. Zotov, Adam R. Schofield, Andrei M. Shkel, “Ultra-High Q Silicon Gyroscopes with Interchangeable Rate and Whole Angle Modes of Operation”, IEEE Sensors 2010 Conference, Waikoloa, Hawaii, USA, November 1-4, 2010.

C95

Sergei A. Zotov, Montgomery C. Rivers, Alexander A. Trusov, Andrei M. Shkel, “Chip-Scale IMU Using Folded-MEMS Approach”, IEEE Sensors 2010 Conference, Waikoloa, Hawaii, USA, November 1-4, 2010.

C94

Igor P. Prikhodko, Sergei A. Zotov, Alexander A. Trusov, Andrei M. Shkel, "Mechanical Characterization of Micromachined Glass-Blown 3-D Spherical Shells”, NSTI Nanotech 2010 Conference, Anaheim, California, USA, June 20-24, 2010.

C93

Sergei A. Zotov, Igor P. Prikhodko, Alexander A. Trusov, Andrei M. Shkel, “ 3-D Micromachined Spherical Shell Resonators with Integrated Electromagnetic and Electrostatic Transducers”, Solid-State Sensors, Actuators, and Microsystems Workshop 2010, Hilton Head Island, South Carolina, USA, June 6-10, 2010.

C92

Alexander A. Trusov, Adam R. Schofield, and Andrei M. Shkel, “Vacuum Packaged Silicon MEMS Gyroscope with Q-Factor above 0.5 Million”, IMAPS 6th International Conference and Exhibition on Device Packaging, Scottsdale, AZ, USA, March 8-11, 2010.

C91

Montgomery C. Rivers, Alexander A. Trusov, Sergei A. Zotov, Andrei M. Shkel, “Micro IMU Utilizing Folded Cube Approach”, IMAPS 6th International Conference and Exhibition on Device Packaging, Scottsdale, AZ, USA, March 8-11, 2010

C90

Adam R. Schofield, Alexander A. Trusov, and Andrei M. Shkel, “Versatile Sub-mTorr Vacuum Packaging for the Experimental Study of Resonant MEMS”, 23rd IEEE MEMS Conference, Wanchai, Hong Kong, China, 24-28 January 2010

C89

Marc Salleras, E. Jesper Eklund, Igor P. Prikhodko, and Andrei M. Shkel, “Predictive Thermal Model for Indirect Temperature Measurement Inside Atomic Cell of Nuclear Magnetic Resonance Gyroscope”, Transducers 2009 Conference, Denver, Colorado, USA, June 21-25, 2009

C88

Adam R. Schofield, Alexander A. Trusov, and Andrei M. Shkel, “Design Trade-Offs of Micromachined Gyroscope Concept Allowing Interchangeable Operation in Both Robust and Precision Modes”, Transducers 2009 Conference, Denver, Colorado, USA, June 21-25, 2009

C87

Alexander A. Trusov, Adam R. Schofield, and Andrei M. Shkel, “Gyroscope Architecture with Structurally Forced Anti-Phase Drive-Mode and Linearly Coupled Anti-Phase Sense-Mode”, Transducers 2009 Conference, Denver, Colorado, USA, June 21-25, 2009

C86

E.J. Eklund, E. Hodby, E.A. Donley, J. Kitching, Shkel A.M. “Reflected Beam Atomic Magnetometer with Microfabricated Optical Bench and Integrated Flexible Interconnects” Government Microcircuit Applications & Critical Technology Conference (GOMACTech09), March 16-19, 2009, Orlando, FL

Journal Papers

J30

Jasmina Casals-Terre, Andreu Fargas-Marques and Andrei M. Shkel, “Snap-Action Bistable Micromechanisms Actuated by Nonlinear Resonance,” Journal of Microelectromechanical Systems, Vol. 17, No. 5, pp. 1082-1093, 2008

J29

Adam Schofield, Alexander A. Trusov, and Shkel A.M, “Effects of Operational Frequency Scaling in Multi-Degree of Freedom MEMS Gyroscopes,” IEEE Sensors Journal, Vol. 8, No. 10, pp. 1672-1680, 2008

J28

Trusov A.A. and Shkel A.M. “A Novel Capacitive-Detection Scheme With Inherent SelfCalibration”, IEEE/ASME Journal of Microelectromechanical Systems Vol. 16, No. 6, pp. 1324-1333, 2007

J27

Alexander A. Trusov, Adam R. Schofield and Andrei M. Shkel, “A Substrate Energy Dissipation Mechanism in In-Phase and Anti-Phase Micromachined z-axis Vibratory Gyroscopes,” Journal of Micromechanics and Microengineering, Vol. 18, pp. 095016, 2008

J26

Maximillian A. Perez and Andrei M. Shkel, “The effect of squeeze film constriction on bandwidth improvement in interferometric accelerometers,” IEEE/ASME Journal of Micromechanics and Microengineering, Vol. 18, No. 5, pp. 055031, 2008

J25

Perez, M. and Shkel A.M. “Design and Demonstration of a Bulk Micromachined Fabry-Perot accelerometer with micro-g resolution”, IEEE Sensors Journal Vol. 7, No. 12, pp. 1653-1662, 2007

J24

E. Jesper Eklund and Andrei M. Shkel, “Single-mask fabrication of high-G piezoresistive accelerometers with extended temperature range,” Journal of Micromechanics and Microengineering, Vol. 17, No. 4, pp. 730-736, 2007

J23

E. Jesper Eklund, Andrei M. Shkel, Svenja Knappe, Elizabeth Donley and John Kitching, “Glass-blown spherical microcells for chip-scale atomic devices,” Sensors and Actuators A: Physical, Vol. 143, Issue 1, pp. 175-180, 2008

J22

Jong S. Kim, Won S. Choi, Dongwook Kim, Andrei Shkel, and Chin C. Lee, “Fluxless silicon-to-alumina bonding using electroplated Au–Sn–Au structure at eutectic composition,” Materials Science and Engineering: A, Vol. 458, pp. 101-107, 2007

J21

Trusov A.A. and Shkel A.M., “Capacitive detection in resonant MEMS with arbitrary amplitude of motion,” Journal of Micromechanics and Microengineering, Vol. 17, No. 8, pp. 1583-1592, 2007

J20

Fargas-Marques A., Casals J., Shkel A.M., “Resonant Pull-In Condition in Parallel-Plate Electrostatic Actuators,” IEEE/ASME Journal of Microelectromechanical Systems, Vol. 16, No. 5, pp. 1044-1053, 2007

J19

E. Jesper Eklund and Andrei M. Shkel, “Glass Blowing on a Wafer Level,” Journal of Microelectromechanical Systems, Vol. 16, No. 2, pp. 232-239, 2007

Conference Papers

C85

A. Schofield, A. Trusov, and Shkel A.M., “Micromachined Gyroscope Design Allowing for Both Robust Wide-Bandwidth and Precision Mode-Matched Operation,” 2008 IEEE Sensors Conference, Lecce, Italy, Oct. 26-29, 2008

C84

A. Trusov, A. Schofield, and Shkel A.M, “ Study of Substrate Energy Dissipation Mechanism in in-Phase and Anti-Phase Micromachined Vibratory Gyroscopes,” 2008 IEEE Sensors Conference, Lecce, Italy, Oct. 26-29, 2008

C83

A. Trusov, A. Schofield, and Shkel A.M, “ On Mechanisms of Energy Dissipation and Transfer in MEMS Vibratory Gyroscopes Operated in Vacuum,” 8th World Congress on Computational Mechanics (WCCM8), Venice, Italy, June 30 – July 4, 2008

C82

A. Trusov, A. Schofield, and Shkel A.M., “New Architectural Design of a Temperature Robust MEMS Gyroscope with Improved Gain-Bandwidth Characteristics,” Solid-State Sensors, Actuators, and Microsystems Workshop 2008, Hilton Head Island, South Carolina, June 1-5, 2008

C81

M.A. Perez, J. Kitching and A.M. Shkel, “Robust Optical Design of Angled Multilayer Dielectric Mirrors Optimized for Rubidium Vapor Cell Return Reflection,” Solid-State Sensors, Actuators, and Microsystems Workshop 2008, Hilton Head Island, South Carolina, June 1-5, 2008

C80

M.A. Perez, U. Nguyen, S. Knappe, E. Donley, J. Kitching, and A.M. Shkel, “Rubidium Vapor Cell with Integrated Nonmetallic Multilayer Reflectors,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), pp. 790-793, Tucson, AZ, USA, January 13-17, 2008

C79

A. Trusov, I. Chepurko, A. Schofield, and Shkel A.M., “A Standalone Programmable Signal Processing Unit for Versatile Characterization of MEMS Gyroscopes,” 2007 IEEE Sensors Conference, Atlanta, GA, USA, Oct. 28-31, 2007

C78

Adam R. Schofield, Alexander A. Trusov, and Andrei M. Shkel, “Multi-Degree of Freedom Tuning Fork Gyroscope Demonstrating Shock Rejection,” 2007 IEEE Sensors Conference, Atlanta, GA, USA, Oct. 28-31, 2007

C77

Alexander A. Trusov and Andrei M. Shkel, “ A Novel Capacitive Detection Scheme with Inherent Self-Calibration,” ASME 2007 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference (IDETC/CIE 2007), Las Vegas, USA, Sept. 4-7, 2007

C76

Adam R. Schofield, Alexander A. Trusov, and Andrei M. Shkel, “Structural Design Trade-offs for MEMS Vibratory Rate Gyroscopes with 2-DOF Sense Modes,” ASME 2007 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference (IDETC/CIE 2007), Las Vegas, USA, Sept. 4-7, 2007

C75

Alexander A. Trusov and Andrei M. Shkel, “The Effect of High Order Non-Linearities on Sub-Harmonic Excitation with Parallel Plate Capacitive Actuators,” ASME 2007 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference (IDETC/CIE 2007), Las Vegas, USA, Sept. 4-7, 2007

C74

Maximillian A. Perez and Andrei M. Shkel, “The Performance Effects of Squeeze Film Stiffness on Non-Resonate Interferometric Intertial Sensors,” ASME 2007 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference (IDETC/CIE 2007), Las Vegas, USA, Sept. 4-7, 2007

C73

Adam R. Schofield, Alexander A. Trusov, Cenk Acar and Andrei M. Shkel, “Anti-Phase Driven Rate Gyroscope with Multi-Degree of Freedom Sense Mode,” International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS ’07), pp. 1199-1202, Lyon, France, June 10-14, 2007

C72

Alexander A. Trusov and Andrei M. Shkel, “Parallel Plate Capacitive Detection of Large Amplitude Motion in MEMS,” International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS ’07), pp. 1693-1696, Lyon, France, June 10-14, 2007

C71

E. Jesper Eklund, Andrei M. Shkel, Svenja Knappe, Elizabeth Donley and John Kitching, “Spherical Rubidium Vapor Cells Fabricated by Micro Glass Blowing,” IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007), pp. 171-174, Kobe, Japan, January 21-25, 2007

Journal Papers

J18

Cenk Acar and Andrei M. Shkel, “Inherently Robust Micromachined Gyroscopes With 2-DOF Sense-Mode Oscillator”, Journal of Microelectromechanical Systems, Vol. 15, No. 2, pp. 380-387, 2006

J17

Andrei M. Shkel and Fan-Gang Zeng, “An Electronic Prosthesis Mimicking the Dynamic Vestibular Function”, Audiology and Neurotology. Special issue on Micro- and Nanotechnology for Neurotology. Karger Publisher. Vol. 11, No. 2, 2006

J16

Acar C. and Shkel A.M., “An Approach for Increasing Drive-Mode Bandwidth of MEMS Vibratory Gyroscopes”, Journal of Microelectromechanical Systems, Vol. 14, No. 3, pp. 520-528, 2005

J15

Eklund J. and Shkel A.M., “Factors affecting the performance of micromachined sensors based on Fabry-Perot interferometry”, Journal of Micromechanics and Microengineering, Vol. 15, No. 9, pp. 1770-1776, 2005

J14

Acar C. and Shkel A.M., “Structurally decoupled micromachined gyroscopes with post-release capacitance enhancement”, J. Micromech. Microeng., Vol.15, pp.1092-1101, 2005

J13

Perez M. and Shkel A.M., “Conceptual design and preliminary characterization of serial array system of high-resolution MEMS accelerometers with embedded optical detection”, Smart Structures and Systems, Vol. 1, No. 1, pp. 63-82, 2005

Conference Papers

C70

Andrei M. Shkel, “An Electronic Prosthesis Mimicking the Dynamic Vestibular Function”, Proc. SPIE 6174, 617414, Smart Structures and Materials 2006, San Diego, CA, USA

C69

Trusov A., Acar C., Shkel A.M., “Comparative analysis of distributed mass micromachined gyroscopes fabricated in SCS-SOI and EFAB”, Proc. SPIE 6174, 61742A, Smart Structures and Materials 2006, San Diego, CA, USA

C68

Andrei M. Shkel, “ On Development of Totally Implantable Vestibular Prosthesis”, pp. 12-19, IFAC Mechatronics 2006, Heidelberg, Germany

C67

Perez M., Shkel A.M., “Passive Network of Fabry-Perot based Sensors with Wavelength Multiplexing Capabilities”, Proc. SPIE 6174, 617417, Smart Structures and Materials 2006, San Diego, CA, USA

C66

Maximillian Perez and Andrei M. Shkel, “Performance Trade-offs of an Interferometric Micro-g Resolution Accelerometer”, 2006 IEEE Sensors Conference, Daegu, Korea, 2006

C65

Andrei M. Shkel, “Type I and Type II Micromachined Vibratory Gyroscopes”, pp. 586-593, IEEE/ION PLANS 2006, San Diego, CA, USA (invited)

C64

Jong S. Kim, Won S. Choi, Dongwook Kim, Shkel A.M., and Chin C. Lee “Fluxless Bonding of Silicon to Alumina Substrate Using Electroplated Eutectic Au-Sn Solder”, the Electronic Components and Technology Conference (ECTC), San Diego, California, May 30- June 2, 2006

C63

Perez M., Eklund J., Shkel A.M., “Designing Micromachined Accelerometers with Interferometric Detection”, pp. 652-655, 2005 IEEE Sensors, Irvine, CA, USA

C62

Painter C. and Shkel A.M, “Experimental Evaluation of a Control System for an Absolute Angle Measuring Micromachined Gyroscope”, pp. 1084-1087, 2005 IEEE Sensors, Irvine, CA, USA

C61

Acar C., Shkel A.M., Costlow L, and Madni A., “Inherently Robust Micromachined Gyroscopes with 2-DOF Sense-Mode Oscillator”, pp. 664-667, 2005 IEEE Sensors, Irvine, CA, USA

C60

A. Fargas-Marques and A. M. Shkel, “On Electrostatic Actuation Beyond Snapping Condition”, pp. 600-603, 2005 IEEE Sensors, Irvine, CA, USA

C59

Eklund J., Shkel A.M., “Single-Mask SOI Fabrication Process for Linear and Angular Piezoresistive Accelerometers with On-Chip Reference Resistors”, pp. 656-659, 2005 IEEE Sensors, Irvine, CA, USA

C58

Casals J., Shkel A.M., “Snap-Action Bistable Micromechanism Actuated By Nonlinear Resonance”, pp. 893-896, 2005 IEEE Sensors, Irvine, CA, USA

C57

Shkel A.M., Acar C., Painter C., “Two Types of Micromachined Vibratory Gyroscopes”, pp. 531-536, 2005 IEEE Sensors, Irvine, CA, USA

C56

Fargas-Marques, A. and Shkel A.M. “On Electrostatic Actuation Beyond Snapping Condition”, 2005 Eurosensors, September 2005, Barcelona, Spain

C55

Perez M., and Shkel A.M, “Elastomeric Composites to Reduce the Effects of Trunnion Mode in Inertial Devices”, NSTI Nanotech 2005 Conference, pp. 557-560, May 2005

C54

Eklund J., Shkel A.M., “Performance Tradeoffs in MEMS Sensors with High-Finesse Fabry-Perot Interferometry Detection”, NSTI Nanotech 2005 Conference, pp. 533-536, May 2005

C53

Acar C., Painter C., Schofield A.R., and Shkel A.M., “ Robust Micromachined Gyroscopes for Automotive Applications”, NSTI Nanotech 2005 Conference, pp. 375-378, May 2005

Journal Papers

J12

Acar C. and Shkel A.M., “Structural Design and Experimental Characterization of Torsional Micromachined Gyroscopes with Non-Resonant Drive-Mode”, Journal of Micromechanics and Microengineering, Institute of Physics Publishing, Vol. 14, January 2004, pp. 15-25

J11

Sadovnichii, V.A., Alexandrov V.V., Alexandrova T.B., Lemak S.S., and Shkel A.M. “Vestibular function under extreme conditions of personal navigation and its corrections”, Moscow University Mechanics Bulletin, Vol. 58 (4), pp. 1-12, 2003

J10

Acar C. and Shkel A.M. “Experimental evaluation and comparative analysis of commercial variable-capacitance MEMS accelerometers”, Journal of Micromechanics and Microengineering, Institute of Physics Publishing, Vol. 13, pp.1-12, 2003

J9

Painter C. and Shkel A.M.,, “Active Structural Error Suppression in MEMS Rate Integrating Gyroscopes”, IEEE Sensors Journal, Vol. 3, Number 5, pp. 595-606, October 2003

J8

Acar C. and Shkel A.M, “Non-Resonant Micromachined Gyroscopes with Structural Mode-Decoupling” IEEE Sensors Journal, Vol. 3, No. 4, pp. 497-506, 2003

J7

Painter C. and Shkel A.M., “Structural and Thermal Modeling of a Z-Axis Rate Integrating Gyroscope”, Journal of Micromechanics and Microengineering, Institute of Physics Publishing, Vol. 13, pp.229-237, 2003

Conference Papers

C52

Casals-Terre, J. and Shkel A.M., “Dynamic Analysis Of A Snap-Action Micromechanism”, pp.1245-1248, 2004 IEEE Sensors, October 2004, Vienna, Austria

C51

Painter, C and Shkel A.M., “Effect of Levitation Forces on the Performance of Surface Micromachined MEMS Gyroscopes”, pp. 508-511, 2004 IEEE Sensors, October 2004, Vienna, Austria

C50

Acar, C and Shkel A.M., “Non-Resonant Surface-Micromachined Z-Axis Gyroscopes Utilizing Torsional Out-of-Plane Detection”, pp. 665-668 2004 IEEE Sensors, October 2004, Vienna, Austria

C49

Acar, C and Shkel A.M., “Post-Release Capacitance Enhancement in Micromachined Devices”, pp.268-271, 2004 IEEE Sensors, October 2004, Vienna, Austria

C48

Shkel A.M. and Fan-Gang Zeng “A MEMS-based Electronic Prosthesis Mimicking the Dynamic Vestibular Function” The 5th UC System-wide Bioengineering Symposium, Irvine, CA, June 26-28, 2004

C47

Rafael C. Gonz´alez , Juan C. Alvarez, Diego Alvarez, Shkel A.M., V. Lumelsky “Sensor Management for Safe Robot Navigation with Bounded Motion and Sensing Capabilities” The 8th Conference on Intelligent Autonomous Systems, IAS-8-2004, March, 2004, Amsterdam, The Netherlands

C46

Juan C. Alvarez, Rafael C. Gonz´alez, Diego A. Prieto, Shkel A.M., V. Lumelsky “Dynamics and Safety in Sensor-Based Motion for Indoor Synchronous Mobile Robots”, The 8th Conference on Intelligent Autonomous Systems, IAS-8-2004, March, 2004, Amsterdam, The Netherlands

C45

Alexandrov V.V., Lemak S., Shkel A.M., Soto E., “Vestibular function in extreme motion conditions of inertial navigation and approaches for its augmentation” 16th IFAC Symposium on Automatic Control in Aerospace, 11-18 June, 2004, St. Petersburg, Russia

C44

Acar C. and Shkel A.M. “An Approach for Increasing Drive-Mode Bandwidth of MEMS Vibratory Gyroscopes” 2004 Solid-State Sensor, Actuator, and Microsystems Workshop, Hilton Head Island, South Carolina, June 2004

C43

Acar C. and Shkel A.M. “A Class of Distributed-Mass Micromachined Gyroscopes” The Electronic Components and Technology Conference (ECTC), 1-4 June, 2004, Las Vegas, Nevada, USA

C42

Perez M. and Shkel A.M. “On Serializing Fabry-Perot m-Accelerometers” Int. Workshop on Advanced Smart Materials and Smart Structures Technology. January 12-14, 2004, Hawaii, USA

C41

Shkel A.M. and Little M.A. “MEMS Fiber Optic Sensor with High Sensitive and Serialization Capabilities into a Linear Array” Int. Workshop on Advanced Smart Materials and Smart Structures Technology. January 12-14, Hawaii, USA

C40

Shkel A.M. “High-Resolution MEMS Array of Inertial Sensors with Embedded Optical Detection” ESF-NSF Workshop on ESF-NSF Workshop on Advancing Technological Frontiers for Feasibility of Ageless Structures , Strasbourg, France, October 2-4, 2003

C39

Gorgiladze G., Shkel A.M. “Correction of Partially Lost Vestibular Function Utilizing Electrical Stimulation” 5th International Conference on Radioelectronics in Medicine, October 1-2, 2003, Moscow, Russia

C38

Acar C., Shkel A. M, “Distributed-Mass Micromachined Gyroscopes for Enhanced Mode-Decoupling” 2003 IEEE Sensors Conference, September 2003, Toronto, Canada

C37

Liu J., Shkel A. M, Zeng F-G “An Electronic Prosthesis Mimicking the DynamicVestibular Function” 2003 IEEE Sensors Conference, September 2003, Toronto, Canada

C36

Acar C. and Shkel A. M “Comparative Characterization of Low-g Capacitive MEMS Accelerometers” International workshop on structural health monitoring, Stanford University, September 15-17, 2003, pp. 1059-1066

C35

Painter C. and Shkel A. M, “Detection of Orientation and Predicted Performance of a MEMS Absolute Angle Measuring Gyroscope” International workshop on structural health monitoring, Stanford University, September 15-17, pp. 1011-1018, 2003

C34

Sadovnichii V.A., Alexandrov V.V., Alexandrova T.B., Bugrov, D.I., Lemak C.C., Sotto and Shkel A.M., “Correction of vestibular function in extreme motion conditions of inertial navigation” IV International Aerospace Congress, IAC’2003, 18-23 August 2003, Moscow, Russia

C33

Painter C., Shkel A. M, “Dynamically Amplified Rate Integrating Gyroscopes” Intern. Conf. On Modeling and Simulation of Microsystems (MSM’2003) March 2003, San Francisco, CA, U.S.A.

C32

Acar C., Shkel A. M “MEMS Gyroscopes with Structurally Decoupled 2-DOF Drive and Sense Mode Oscillators”Intern. Conf. On Modeling and Simulation of Microsystems (MSM’2003) March 2003, San Francisco, CA, U.S.A.

C31

Liu J., Shkel A. M, Nie K., Zeng F-G “System Design and Experimental Evaluation of a MEMS-based Semicircular Canal Prosthesis” Proceedings of the 1st International IEEE EMBS Conference on Neural Engineering, Capri Island, Italy, March 20-22, 2003

C30

Shkel A. M, “Micro-Structures with Error-Suppression and Self-Calibration Control Capabilities” Symposium for TMS 2003 Annual Meeting, Special Session on Advances in MEMS and Optical Packaging, March 2003, San Diego, CA

Journal Papers

J6

Acar C. and Shkel A.M., “Four Degrees-of-Freedom Micromachined Gyroscopes” Journal of Modeling and Simulations of Microsystems, Vol. 2, No. 1, pp. 71-82, 2001.

J5

Alvarez J. C., Shkel A. M., Lumelsky V. J., “Accounting for Mobile Robot Dynamics in Sensor-Based Motion PlanningInternational Journal of Robotics and Automation. International Journal of Robotics and Automation, Vol. 16, No. 3, 2001

J4

Shkel A. M., Lumelsky V. J., “Classification of the Dubins Set”, Robotics and Autonomous Systems, Volume 34 , pp. 179-202, 2001

Conference Papers

C29

Lin, C.H.; Lyons, E.R.; Au, A.; Lee, H.P.; Zaouk, R.; Shkel, A.M. “Design and fabrication of thin-film microheater tuned fiber array device” Lasers and Electro-Optics, 2002. CLEO ’02.

C28

Alvarez J.C., Prieto D.A., Gonz’alez R.C., Shkel A.M., Lumelsky V.J. “Sensor Management for Local Obstacle Detection in Mobile Robots” 2002 IEEE/RSJ International Conference on Intelligent Robots and Systems, Sept. Oct., 2002, EPFL, Switzerland

C27

Shkel A.M., Liu J., Ikea C., Zeng F-G “Feasibility Study and a Prototype of Vestibular Implant Using MEMS Gyroscopes”, 2002 IEEE Sensors, June 2002, Orlando, FL, USA

C26

C. Painter and A. Shkel. "Active structural error suppression in MEMS vibratory gyroscopes", IEEE Sensors 2002, Orlando, FL, June 2002

C25

C. Acar and A. Shkel, "A Class of MEMS Gyroscopes with Increased Parametric Space", IEEE Sensors Conference, June 2002, Orlando, FL, USA

C24

C. Acar and A. Shkel, "Design Concept and Preliminary Experimental Demonstration of MEMS Gyroscopes with ‘Master-Slave’ Architecture", SPIE Conference on Smart Electronics and MEMS, 2002

C23

C. Painter and A. Shkel. "Identification of anisoelasticity for electrostatic “trimming” of rate integrating gyroscopes", 2002 SPIE Annual International Symposium on Smart Structures and Materials, San Diego, CA, March 2002

C22

Shkel A.M., “Micromachined Gyroscopes: Challenges, Design Solutions, and Opportunities” 2001 SPIE Annual International Symposium on Smart Structures and Materials, March, 2001, Newport Beach ,CA

C21

C. Painter, A. Shkel. "Structural and thermal analysis of a MEMS angular gyroscope" SPIE’s 8th annual symposium on Smart Structures and Materials,Newport Beach, CA, March 2001

C20

C. Acar and A. Shkel, "Micro-Gyroscopes with Dynamic Disturbance Rejection", SPIE Conference on Smart Electronics and MEMS, Newport Beach, March 2001

C19

Jung-sik Moon, Shkel A. M, “Analysis of Imperfections in a Micromachined Tunable-Cavity Interferometer”, 2001 SPIE Annual International Symposium on Smart Structures and Materials, March, 2001, Newport Beach, CA

C18

Johanna Young, Shkel A. M, "Comparative Study of 2-DOF Micromirrors for Precision Light Manipulation". Proceedings of SPIE: SPIE Smart Structures and Materials Conference. Newport Beach, CA., March 4-7, 2001.

C17

Jung-sik Moon and Shkel A. M., “Performance Limits of Micromachined Tunable-Cavity Filter”. Intern. Conf. On Modeling and Simulation of Microsystems (MSM’2001) March 2001, Hilton Head Island, South Carolina, U.S.A.

C16

C. Acar and A. Shkel, "A design Approach for Increasing Robustness of Rate Gyroscopes", Modeling and Simulation of Microsystems Conference, Hilton Head Island, South Carolina, March 19-22, 2001

C15

C. Painter, A. Shkel. "Study of a Novel Isotropic Suspension Design for an Angular Gyroscope", Modeling and Simulation of Microsystems Conference, Hilton Head Island, SC, March 2001

C14

Cenk Acar, Sebnem Eler, Shkel A. M., "Concept, Implementation, and Control of Wide Bandwidth MEMS Gyroscopes”, The American Control Conference. June, 2001, Arlington, VA, USA

C13

Shkel A. M., “Smart MEMS: Micro-Structures with Error-Suppression and Self-Calibration Control Capabilities”, The American Control Conference. June, 2001, Arlington VA, USA

*Theses*

C. Acar, Four Degrees-of-Freedom Micromachined Gyroscopes, M.S. Thesis, University of California Irvine, 2001.

J. Moon, TUNABLE MICRO-INTERFEROMETERS FOR TELECOMMUNICATION AND SENSOR APPLICATIONS, M.S. Thesis, University of California Irvine, 2001.

*Technical Reports*

C. Acar, Design Concept and Preliminary Experimental Demonstration of 4-DOF MEMS Gyroscopes,UC Irvine Microsystems Laboratory Technical Report, MSL-01006, 2002.

J.I. Young. "Design, Coupled-Field Modeling, Fabrication and Characterization of Micromirrors for Precision Light Manipulation." UC Irvine Microsystems Laboratory Technical Report, MSL-01007.

C. Acar, Four Degrees-of-Freedom Micromachined Gyroscopes, UC Irvine Microsystems Laboratory Technical Report, MSL-01003, 2001.

Journal Papers

J3

Shen L., Lumelsky V. J., Shkel A. M., “Hazard and Safety Regions for Paths with Constrained Curvature.” Mathematical Methods in the Applied Sciences. Volume 21, pp. 1655-1679, 1998.

J2

Shkel A. M., Lumelsky V. J., “Incorporating Body Dynamics into the Sensor-Based Motion Planning Paradigm. The Maximum Turn Strategy".“ IEEE Trans. On Robotics and Automation.  Volume 13, Number 6, December 1997.

J1

Shkel A. M., Lumelsky V. J., “ The Jogger’s Problem: Control of Dynamics in Real-Time Motion Planning.”  Automatica. Volume 33, Number 7, July 1997, pp. 1219-1233.

Conference Papers

C12

Alvarez J. C., Shkel A. M., Lumelsky V. J., “Active Sensing in Sensor-Based Motion Planning with Dynamics” International Workshop on Intelligent Robots, September 2000, Viena, Austria

C11

Shkel A. M., Lumelsky V. J., “ On Optimal Nonholonomic Path in a Limited Space. The Jogger’s Problem: Control of Dynamics in Real-Time Motion Planning.” IEEE/RSJ Int. Conference on Intelligent Systems, November, 2000, Japan

C10

Shkel A. M., Howe R. T., Horowitz R. “Micromachined Gyroscopes: Challenges, Design Solutions, and OpportunitiesIntern. Workshop on Micro Robots, Micro Machines, and Microsystems (IARP’99). Pp. 27-34. November 1999, Moscow, Russia

C9

Shkel A. M., Horowitz R., Seshia A., Howe R. T. “Dynamics and Control of Micromachined Gyroscopes.” The American Control Conference.June 1999, San Diego, CA

C8

Shkel A. M., Howe R. T., Horowitz R. “Modeling and Simulation of. Micromachined Gyroscopes in Presence of ImperfectionsIntern. Conf. On Modeling and Simulation of Microsystems (MSM’99) April 1999, Puerto Rico, U.S.A.

C7

Shkel A. M., Lumelsky V. J., “Motion Planning Algorithm for Nonholonomic Robots Within a Limited Workspace.” IEEE/RSJ Intern. Conf. On Intelligent Robots and Systems. October 1998, Victoria, Canada.

C6

Alvarez J. C, Shkel A. M., Lumelsky V. J. “Accounting for Mobile Robot Dynamics in Sensor-Based Motion Planning: Experimental Results”. IEEE Intern. Conf. On on Robotics and Automation. May 1998, Leuven, Belgium.

C5

Shkel A. M., Lumelsky V. J., “Curvature-Constrained Motion Within a Limited Workspace.” IEEE Intern. Conf. On Robotics and Automation. April 1997, pp.1394-1399, Albuquerque, NM.

C4

Shkel A. M., Lumelsky V.J., “On Calculation of Optimal Paths with Constrained Curvature: The Case of Long Paths”. IEEE Intern. Conf. On Robotics and Automation. April 1996, pp.3578-3583, Minneapolis, MN.

C3

Shkel A. M., Lumelsky V. J., “The Role of Time Constraints in the Design of Control for the Jogger’s Problem”. IEEE Intern. Conf. On Decision and Control. December 1995, pp.1618-1623, New Orleans, LA.

C2

Shkel A. M., Lumelsky V. J., “ The Jogger’s Problem: Accounting for Body Dynamics in Real-Time Motion Planning”. IEEE/RSJ Intern. Conf. On Intelligent Robots and Systems. August 1995, pp. 441-447, Pittsburgh, PA.

C1

Lumelsky V. J., Shkel A. M. “Incorporating Body Dynamics into the Sensor-Based Motion Planning Paradigm. The Maximum Turn Strategy.”IEEE Intern. Conf. On Robotics and Automation. May 1995, pp.1637-1642, Nagoya, Japan.