Our paper by Mohammed J. Ahamed, Doruk Senkal, Alexander A. Trusov, and Andrei M. Shkel, “Study of High Aspect Ratio NLD Plasma Etching and Postprocessing of Fused Silica and Borosilicate Glass,” IEEE/ASME Journal of Microelectromechanical Systems, vol.44, no.4, pp. 790-800, August 2015. [IEEE Xplore], is among most popular JMEMS publications (25th out of 50 most Popular Articles (August 2015)).

Our paper on glass dry-etching is among most popular JMEMS publications