Our paper “Double-Sided Process for MEMS SOI Sensors with Deep Vertical Thru-Wafer Interconnects” has been accepted as a journal paper for the upcoming JMEMS 2018 issue. Authors: A. Efimovskaya, Y. Lin, and A.M. Shkel
Our paper on “High Quality Factor MEMS Gyroscope with Whole Angle Mode of Operation” has been accepted for presentation in the upcoming INERTIAL 2018 Conference. Authors: S. Askari, M. H. Asadian, and A.M. Shkel
Alexandra Efimovskaya in December 2017 successfully defended her Ph.D. Thesis titled “Multi-Axis Solution for MEMS Inertial Sensors”. Congratulations to Dr. Efimovskaya!