Two papers have been accepted to the Solid-State Sensors, Actuators, and Microsystems Workshop 2012: “Titania Silicate / Fused Quartz Glassblowing for 3-D Fabrication of Low Internal Loss Wineglass Micro-structures” by Doruk Senkal, Christopher R. Raum, Alexander A. Trusov, and Andrei M. Shkel, and “Achieving Long-Term Bias Stability in High-Q Inertial MEMS by Temperature Self-Sensing with a 0.5 Millicelcius Precision” by Igor…Continue Reading Hilton Head 2012
JMEMS Letters
One paper has been accepted for JMEMS Letters: “3-D Spherical Shell Resonator Gyroscope Fabricated Using Wafer-Scale Glassblowing”…Continue Reading JMEMS Letters
US Patent # 8,113,050 Issued
U.S. Patent 8,113,050 entitled ” Robust six degree-of-freedom micromachined gyroscope with anti-phase drive scheme and method of operation of the same,” by Cenk Acar, Andrei Shkel, Adam Schofield, Lynn Costlow, Asad Madni has been awarded. [PDF]…Continue Reading US Patent # 8,113,050 Issued
U.S. Patent # 8,094,841 Issued
U.S. Patent 8,094,841 entitled “Apparatus and method using capacitive detection with inherent self-calibration,” by Alexander A. Trusov and Shkel M. Andrei has been awarded. [PDF]…Continue Reading U.S. Patent # 8,094,841 Issued
SoC Poster Award
The poster titled “Single-Chip 3-Axis MEMS Inertial Measurement Unit with Inherent Frequency Modulation” by B.R. Simon, S. A. Zotov, A.A. Trusov, and A.M. Shkel has received first place at the 9th International System-on-Chip (SoC) Conference….Continue Reading SoC Poster Award