Publications

Books

  • Shkel A.M. “Inertial Microsensors”. Springer Publisher. MEMS Bookshelf Series, (available for pre-orders, to appear in 2014). Springer Publisher. ISBN 978-0-387-35540-5 [Link]

Patents

  • Andrei Shkel,Alex Trusov,Igor Prikhodko,Sergei Zotov “Three-Dimensional Wafer-Scale Batch-Micromachined Sensor and Method of Fabrication for the same.” [PDF]
  • Adam Schofield,Alex Trusov,Andrei Shkel,” Micromachined gyroscopes with 2-DOF sense modes allowing interchangeable robust and precision operation. [PDF]
  • Alex Trusov,Adam Schofield,Andrei Shkel,” Temperature Robust MEMS Gyroscope with 2-DOF sense mode addressing the trade-off between bandwidth and gain. [PDF]
  • Alex Trusov,Montgomery Rivers,Sergei Zotov,Andrei Shkel,” Three dimensional folded MEMS technology for multi-axis sensor systems”, US Patent 8368154 B2. [PDF]

Journal Papers

  • Mohammad H. Asadian, Sina Askari, Andrei Shkel, “An ultra-high vacuum packaging process demonstrating over 2 million Q-factor in MEMS vibratory gyroscopes”, IEEE Sensors Letters, Vol. 1, Issue 6, December 2017, DOI 10.1109/LSENS.2017.2762287. [IEEE Xplore] [PDF]
  • Yusheng Wang, Mohammad H. Asadian, and Andrei M. Shkel. “Modeling the Effect of Imperfections in Glassblown Micro-Wineglass Fused Quartz Resonators.” Journal of Vibration and Acoustics 139.4 (2017): 040909. [PDF]
  • Alexandra Efimovskaya, Yu-Wei Lin, Andrei M. Shkel, “Origami-Like 3-D Folded MEMS Approach for Miniature Inertial Measurement Unit”, IEEE/ASME Journal of Microelectromechanical Systems, (2017). [IEEE Xplore]
  • Sergei A. Zotov, Brenton R. Simon, Alexander A. Trusov, and Andrei M. Shkel, “High Quality Factor Resonant MEMS Accelerometer With Continuous Thermal Compensation,” Sensors Journal, IEEE, vol.15, no.9, pp.5045,5052, Sept. 2015. [IEEE Xplore]
  • Mohammed J. Ahamed, Doruk Senkal, Alexander A. Trusov, and Andrei M. Shkel, “Study of High Aspect Ratio NLD Plasma Etching and Postprocessing of Fused Silica and Borosilicate Glass,” JMEMS Journal of Microelectromechanical Systems, vol.PP, no.99, pp.1,1, June 2015. [IEEE Xplore]
  • Doruk Senkal, Mohammed J. Ahamed, Mohammad A. Asadian Ardakani, Sina Askari and Andrei M. Shkel, “Demonstration of 1 Million Q-Factor on Microglassblown Wineglass Resonators With Out-of-Plane Electrostatic Transduction,” IEEE/ASME Journal of Microelectromechanical Systems, 24 (1), pp. 29-37, February 2015. [IEEE Xplore]
  • Doruk Senkal, Mohammed J. Ahamed, Alexander Trusov, and Andrei M. Shkel, “Electrostatic and Mechanical Characterization of 3-D Micro-wineglass Resonators,” Sensors and Actuators A: Physical, 215, pp. 150-154, 15 August 2014. [PDF]
  • Sergei A. Zotov, Brent R. Simon, Igor P. Prikhodko, Alexander A. Trusov, Andrei M. Shkel, “Quality Factor Maximization through Dynamic Balancing of Tuning Fork Resonator” IEEE Sensors Journal, VOL. 14, NO. 8, pp. 2706 – 2714, AUGUST 2014. [IEEE Xplore]
  • D. Senkal, M. J. Ahamed, A. A. Trusov, and A. M. Shkel, “Achieving Sub-Hz Frequency Symmetry in Micro-Glassblown Wineglass Resonators,” Journal of Microelectromechanical Systems, vol. 23, no. 1, pp. 30–38, 2014 [IEEE Xplore]

Conference Papers

  • Danmeng Wang, Mohammad H. Asadian, Alexandra Efimovskaya, Andrei M. Shkel, “A Comparative Study of Conventional Single-Mass
    and Amplitude Amplified Dual-Mass MEMS Vibratory Gyroscopes “, IEEE Inertial Sensors 2017, Kauai, HI, USA, March 27 – 30, ( 2017). [PDF]
  • Yusheng Wang, Mohammad H. Asadian, and Andrei M. Shkel, “Frequency Split Reduction by Directional Lapping of Fused Quartz Micro Wineglass Resonators”, IEEE Inertial Sensors 2017, Kauai, HI, USA, March 27 – 30, ( 2017). [PDF]
  • Yu-Wei Lin, Alexandra Efimovskaya, and Andrei M. Shkel, “Study of Environmental Survivability and Stability of Folded MEMS IMU”, IEEE Inertial Sensors 2017, Kauai, HI, USA, March 27 – 30, ( 2017). [PDF]
  • Mohammad H. Asadian, Yusheng Wang, Sina Askari and Andrei M. Shkel, “Controlled Capacitive Gaps for Electrostatic Actuation and Tuning of 3D Fused Quartz Micro Wineglass Resonator Gyroscope”, IEEE Inertial Sensors 2017, Kauai, HI, USA, March 27 – 30, ( 2017). [PDF]
  • Radwan M. Noor, Venu Gundeti, and Andrei M. Shkel, “A Status on Components Development for Folded Micro NMR Gyro”, IEEE Inertial Sensors 2017, Kauai, HI, USA, March 27 – 30, ( 2017). [PDF]
  • Alexandra Efimovskaya, Yushi Yang, Eldwin Ng, Yunhan Chen, Ian Flader, Thomas W. Kenny, and Andrei M. Shkel, “Compact Roll-Pitch-Yaw Gyroscope
    Implemented in Wafer-level Epitaxial Silicon Encapsulation Process”, IEEE Inertial Sensors 2017, Kauai, HI, USA, March 27 – 30, ( 2017). [PDF]
  • Alexandra Efimovskaya, Yu-Wei Lin, Danmeng Wang, and Andrei M. Shkel, “Electrostatic Compensation of Structural Imperfections in Dynamically Amplified Dual-Mass Gyroscope”, IEEE Inertial Sensors 2017, Kauai, HI, USA, March 27 – 30, ( 2017). [PDF]
  • J. Giner, Y. Zhang, D. Maeda, K. Ono, A.M. Shkel, and T. Sekiguchi, “Dynamically Balanced Degenerate Mode Gyro with Sub-Hz Frequency Symmetry and Temperature Robustness”, IEEE MEMS 2017, Las Vegas, NV, USA, January 22-26, ( 2017). [PDF]
  • Alexandra Efimovskaya, Yu-Wei Lin, Yushi Yang, Eldwin Ng, Yunhan Chen, Ian Flader, Chae H. Ahn, Vu Hong, Thomas W. Kenny, and Andrei M. Shkel, “On Cross-Talk Between Gyroscopes Integrated on a Folded MEMS IMU Cube”, IEEE MEMS 2017, Las Vegas, NV, USA, January 22-26, ( 2017). [PDF]
  • Yusheng Wang, Mohammad Asadian, Andrei Shkel, “Predictive Analytical Model of Fundamental Frequency and Imperfections in Glassblown Fused Quartz Hemi-Toroidal 3D Micro Shells”, IEEE Sensors 2016, Orlando, FL, USA, Oct30-Nov2, (2016). [IEEE Xplore]
  • Alexandra Efimovskaya, Danmeng Wang, Yu-Wei Lin, and Andrei M. Shkel, “On Ordering of Fundamental Wineglass Modes in Toroidal Ring Gyroscope”, IEEE Sensors 2016, Orlando, FL, USA, Oct30-Nov2, (2016). [IEEE Xplore]
  • Sina Askari, Mohammad H. Asadian, Kasra Kakavand, Andrei M. Shkel, “Near-Navigation Grade Quad Mass Gyroscope with Q-factor Limited by Thermo-Elastic Damping”, Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2016), Hilton Head Island, South Carolina, USA, June 5-9, 2016. [PDF]
  • Alexandra Efimovskaya, Yu-Wei Lin, Andrei M. Shkel, “Thru-Wafer Interconnects for Double-Sided (TWIDS) Fabrication of MEMS”, IEEE Inertial Sensors, Laguna Beach, CA, USA, 22-25 February, 2016. [IEEE Xplore]
  • Sina Askari, Mohammad H. Asadian, Kasra Kakavand, Andrei M. Shkel, “Vacuum Sealed and Getter Activated MEMS Quad Mass Gyroscope Demonstrating Better Than 1.2 Million Quality Factor”, IEEE Inertial Sensors, Laguna Beach, CA, 22-25 February, 2016. [IEEE Xplore]
  • Yusheng Wang, Andrei M. Shkel, “Study on Surface Roughness Improvement of Fused Quartz After Thermal and Chemical Post-Processing”, IEEE Inertial Sensors, Laguna Beach, CA, USA, 22-25 February, 2016. [IEEE Xplore]
  • Brenton R. Simon, Sambuddha Khan, Alexander A. Trusov, Andrei M. Shkel, “Mode ordering in tuning fork structures with negative structural coupling for mitigation of common-mode g-sensitivity”, in SENSORS, 2015 IEEE, Busan, South Korea, 1-4 Nov, 2015. [IEEE Xplore]
  • Yusheng Wang, Andrei M. Shkel, “Near-Zero Power Wake UP System Enabled by Ultra High Q-Factor Array of MEMS Resonators”, 4th International Symposium on Energy Challenges and Mechanics – working on small scales (ECM4), Aberdeen, Scotland, United Kingdom, 11-13 August, 2015. [PDF]
  • Alexandra Efimovskaya, Doruk Senkal, Andrei M. Shkel, “Miniature origami-like folded MEMS TIMU”, IEEE Transducers 2015 Conference 2015, Alaska, USA, June 21-25, 2015. [IEEE Xplore]
  • Doruk Senkal, Alexandra Efimovskaya, Andrei M. Shkel, “Dual foucault pendulum gyroscope”, IEEE Transducers 2015 Conference 2015, Alaska, USA, June 21-25, 2015. [IEEE Xplore]
  • Doruk Senkal, Alexandra Efimovskaya, Andrei M. Shkel, “Minimal realization of dynamically balanced lumped mass WA gyroscope: dual foucault pendulum”, IEEE ISISS 2015, Hawaii, USA, March 23-26, 2015. [IEEE Xplore]
  • Alexandra Efimovskaya, Doruk Senkal, Sina Askari, Andrei M. Shkel, “Origami-like folded mems for realization of TIMU: fabrication technology and initial demonstration”, IEEE ISISS 2015, Hawaii, USA, March 23-26, 2015. [IEEE Xplore]
  • Joan Giner, Andrei M. Shkel, “The concept of “collapsed electrodes” for glassblown spherical resonators demonstrating 200:1 aspect ratio gap definition”, IEEE ISISS 2015, Hawaii, USA, March 23-26, 2015. [IEEE Xplore]
  • Joan Giner, Jason M. Gray, Jonas Gertsch, Victor M. Bright, Andrei M. Shkel, “Design, Fabrication, and Characterization of a Micromachined Glass-Blown Spherical Resonator with In-Situ Integrated Silicon Electrodes and ALD Tungsten Interior Coating”, IEEE MEMS 2015, Estoril, Portugal, January 18-22, 2015. [IEEE Xplore]
  • Doruk Senkal, Eldwin Ng, Vu Hong, Yushi Yang, Chae Hyuck Ahn, Thomas W. Kenny, Andrei M. Shkel, “Parametric Drive of a Toroidal MEMS Rate Integrating Gyroscope Demonstrating < 20 ppm Scale Factor Stability”, IEEE MEMS 2015, Estoril, Portugal, January 18-22, 2015. [IEEE Xplore]
  • Alexandra Efimovskaya, Andrei M. Shkel, “160 Milli-Ohm Electrical Resistance Thru-Wafer Interconnects with 10:1 Aspect Ratio”. IMAPS 2014 Conference, October 13-16, San Diego,CA, 2014 [Link]
  • Doruk Senkal, Mohammed J. Ahamed, Mohammad H. Asadian, Sina Askari, Andrei M. Shkel, “Out-of-plane electrode architecture for fused silica micro-glassblown 3-D wineglass resonators”. IEEE Sensors 2014 Conference, pp. 994 – 997, November 2-5, Valencia, Spain, 2014 [Link]
  • Jie Han, Sergei A. Zotov, Brenton R. Simon, Igor P. Prikhodko, Gunjana Sharma, Alexander A. Trusov, Andrei M. Shkel, “Electrostatic stabilization of thermal variation in quality factor using anchor loss modulation”. IEEE Sensors 2014 Conference, pp. 998 – 1001, November 2-5, Valencia, Spain, 2014 [Link]
  • Sergei A. Zotov, Igor P. Prikhodko, Brenton, R. Simon, Alexander A. Trusov, Andrei M. Shkel, “Self-Calibrated MEMS Gyroscope with AM/FM Operational Modes, Dynamic Range of 180 dB, and In-Run Bias Stability of 0.1 deg/hr,” Inertial Sensors and Systems – Symposium Gyro Technology 2014, Karlsruhe, Germany, September 16-17, 2014 [PDF]
  • Doruk Senkal, Mohammad J. Ahamed, Sina Askari, Andrei M. Shkel, “MEMS Micro-Glassblowing Paradigm for Wafer-Level Fabrication of Fused Silica Wineglass Gyroscopes”, Eurosensors 2014, Brescia, Italy, September 7-10, 2014 [PDF]
  • Alexander Trusov, David Rozelle, Grant Atikyan, Brenton Simon, Sergei Zotov, Andrei Shkel, Douglas Meyer, “Flat Is Not Dead: Current and Future Performance of Si-MEMS Quad Mass Gyro (QMG) System”, ION JNC 2014, Orlando, FL, USA, June 16-18, 2014 [PDF]
  • Doruk Senkal, Mohammed Jalal Ahamed, Sina Askari, Andrei Shkel, “1 Million Q-Factor Demonstrated on Micro-Glassblown Fused Silica Wineglass Resonators with Out-of-Plane Electrostatic Transduction”, Solid-State Sensors, Actuators, and Microsystems Workshop 2012, Hilton Head Island, South Carolina, USA, June 8-12, 2014. [PDF]
  • Sergei Zotov, Brenton Simon, Gunjana Sharma, Jie Han, Igor Prikhodko, Alexander Trusov, Andrei Shkel, “Investigation of Energy Dissipation in Low Frequency Vibratory MEMS Demonstrating a Resonator with 25 Minutes Time Constant”, Solid-State Sensors, Actuators, and Microsystems Workshop 2014, Hilton Head Island, South Carolina, USA, June 8-12, 2014. [PDF]
  • Alexander Trusov, David Rozelle, Grant Atikyan, Sergei Zotov, Brenton Simon, Andrei Shkel, Douglas Meyer, “Non-Axisymmetric Coriolis Vibratory Gyroscope with Whole Angle, Force REbalance, and Self-Calibration”, Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2014), Hilton Head Island, SC, USA, June 8-12, 2014. [PDF]
  • Alexander Trusov, David Rozelle, Grant Atikyan, Brenton Simon, Sergei Zotov, Andrei Shkel, Douglas Meyer, “Flat Is Not Dead: Current and Future Performance of Si-MEMS Quad Mass Gyro (QMG) System”, IEEE/ION PLANS 2014, Monterey, CA, USA, May 6-7, 2014 [PDF]
  • Doruk Senkal, Mohammed Jalal Ahamed, Andrei Shkel, “Design and Modeling of Micro-glassblown Inverted-wineglass Structures”, IEEE ISISS 2014, Laguna Beach, CA, USA, February 25-26, 2014. [PDF]
  • Joan Giner, Lorenzo Valdevit, Andrei Shkel, “Glass-Blown Pyrex Resonator with Compensating Ti Coating for Reduction of TCF”, IEEE ISISS 2014, Laguna Beach, CA, USA, February 25-26, 2014. [PDF]
  • Mohammed Jalal Ahamed, Doruk Senkal, Andrei Shkel, “Effect of Annealing on Mechanical Quality Factor of Fused Quartz Hemispherical Resonator”, IEEE ISISS 2014, Laguna Beach, CA, USA, February 25-26, 2014. [PDF]
  • Sergei Zotov, Igor Prikhodko, Brenton Simon, Alexander Trusov, Andrei Shkel, “Optimization of Orbital Trajectory for Frequency Modulated Gyroscope”, IEEE ISISS 2014, Laguna Beach, CA, USA, February 25-26, 2014. [PDF]
  • Igor Prikhodko, Alexander Trusov, Andrei Shkel, “Comparative Analysis of Nuclear Magnetic Resonance and Whole Angle Coriolis Vibratory Gyroscopes”, IEEE ISISS 2014, Laguna Beach, CA, USA, February 25-26, 2014. [PDF]
  • Brenton Simon, Gunjana Sharma, Sergei Zotov, Alexander Trusov, Andrei Shkel, “Intrinsic Stress of Eutectic Au/Sn Die Attachment and Effect on Mode-Matched MEMS Gyroscopes”, IEEE ISISS 2014, Laguna Beach, CA, USA, February 25-26, 2014. [PDF]
  • Mohammed Jalal Ahamed, Doruk Senkal, Andrei Shkel, “Improvement of Side-wall Roughness in Deep Glass Etched MEMS Vibratory Sensors”, IEEE ISISS 2014, Laguna Beach, CA, USA, February 25-26, 2014. [PDF]
  • Sergei Zotov, Brenton Simon, Gunjana Sharma, Alexander Trusov, Andrei Shkel, “Utilization of Mechanical Quadrature in Silicon MEMS Vibratory Gyroscope to Increase and Expand the Long Term In-Run Bias Stability”, IEEE ISISS 2014, Laguna Beach, CA, USA, February 25-26, 2014. [PDF]
  • Alexander Trusov, G. Atikyan, D.M. Rozelle, A.D. Meyer, Sergei Zotov, Brenton Simon, Andrei Shkel, “Force Rebalance, Whole Angle, and Self-Calibration Mechanization of Silicon MEMS Quad Mass Gyro”, IEEE ISISS 2014, Laguna Beach, CA, USA, February 25-26, 2014. [PDF]
  • Doruk Senkal, Sina Askari, Mohammed J. Ahamed, Eldwin Ng, Vu Hong, Yushi Yang, Chae Hyuck Ahn, Thomas W. Kenny, Andrei M. Shkel, “100k Q-Factor Toroidal Ring Gyroscope Implemented in Wafer-level Epitaxial Silicon Encapsulation Process”, IEEE MEMS 2014, San Francisco, CA, USA, January 26-30, 2014. [PDF]